Development and Evaluation of a Teensy Microcontroller-based O2 Mass Flow Controller |
Yu, Min Sang
(Department of Electronic Engineering, Gachon University)
Jang, Yeonsook (Femto Science) Kim, Muhwan (Femto Science) Cho, Sungbo (Department of Electronic Engineering, Gachon University) |
1 | https://worldhealthorg.shinyapps.io/covid, Accessed on Jan. 10, 2021. |
2 | https://covid19.who.int/?gclid=CjwKCAjw-e2EBhAhEiwAJI5jgyCpP5gJztsQSuB_YcwAvOPQSO9RIF4FBZW3r-NdN2tNj3LN6aGmRoCQKMQAvD_BwE. Accessed on May. 13, 2021. |
3 | Sanche S, Lin YT, Xu C, Romero-Severson E, Hengartner N, Ke R. High contagiousness and rapid spread of severe acute respiratory syndrome coronavirus 2. Emerging infectious diseases. 2020;26(7):1470-1477. DOI |
4 | https://www.horiba.com/at/semiconductor/technical-resourcecenter/operating-principles/what-is-a-mass-flow-controller, Accessed on Aug. 24, 2021 |
5 | Bruschi P, Navarrini D, Piotto M. A closed-loop mass flow controller based on static solid-state devices. Journal of microelectromechanical systems. 2006;15(3):652-658. DOI |
6 | Videometric mass flow control: A new method for real-time measurement and feedback control of powder micro-feeding based on image analysis. International Journal of Pharmaceutics. 2020;580:119223. DOI |
7 | Bruschi P, Navarrini D, Piotto M. A closed-loop mass flow controller based on static solid-state devices. Journal of microelectromechanical systems. 2006;15(3):652-658. DOI |
8 | http://educypedia.karadimov.info/library/Ziegler_Nichols.pdf, Accessed on Dec. 15, 2020. |
9 | Lawrence ED, and Henning AK. Reliability of MEMS-based mass-flow controllers for semiconductor processing. 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003;478-483. |
10 | Singer BD, Corbridge TC. Basic invasive mechanical ventilation. South Med J. 2009;102(12):1238-1245. DOI |
11 | Khan A, Naveed M, Dur-e-Ahmad M, Imaran M. Estimating the basic reproductive ratio for the Ebola outbreak in Liberia and Sierra Leone. Infectious diseases of poverty 4. 2015;4.1:1-8 |
12 | Lee BR. Sensor Instrumentation Engineering. Seoul: Hongneung Science Publishing Co., Ltd; 2011;168-179. |
13 | https://www.health.gov.au/sites/default/files/documents/2020/03/coronavirus-covid-19-information-for-clinicians.pdf, Accessed on Feb. 2, 2021. |
14 | Liso A, Kehoe A, Saleem M. A New Differential Pressure Sensor Based Mass Flow Controller for Advanced Semiconductor Processing. 2019 China Semiconductor Technology International Conference (CSTIC). 2019;1-5. |
15 | Sadiku Matthew NO. Elements of electromagnetics 6th ed. New York: Oxford University Press; 2014;369-387. |
16 | Chunchen W, Feng C, Guang Z, Ming Y, Liangzhe L, Taihu W. Design of genetic algorithm optimized PID controller for gas mixture system. 2017 13th IEEE International Conference On Electronic Measurement & Instruments (ICEMI). 2017;6-9. |
17 | Aisuwarya R, Hidayati Y. Implementation of ziegler-nichols PID tuning method on stabilizing temperature of hot-water dispenser. 2019 16th International Conference on Quality in Research (QIR): International Symposium on Electrical and Computer Engineering. 2019;1-5. |
18 | Charles K, Alexander NO. Matthew. Fundamentals of electric circuits 6th ed. New York: McGraw-hill Education; 2017;173-183. |
19 | Kim TM, Jeon JW. A Study on the Real-Time Flow Rate Change Monitoring Methods of Mass Flow Controller in In-Situ Semiconductor Processing. 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2021;1-4. |
20 | Iyer N, Shinde S, Dhawale T, Shelar N. Development of ARM Based Embedded Controller for Mass Flow Controller System. 2017 Trends in Industrial Measurement and Automation (TIMA). 2017;1-4. |
21 | Benesty J, Chen J, Huang Y, Cohen I. Pearson correlation coefficient. Noise reduction in speech processing. 2009;2:1-4. |
22 | Park JH, Ho YJ, Lee DH, Choi JS. A Study for Application of Standard and Performance Test According to Purpose and Subject of Respiratory Medical Device. Journal of Biomedical Engineering Research. 2019;40(5):215-221. |
23 | Younes M, Kun J, Webster K, Roberts D. Response of Ventilator-Dependent Patients to Delayed Opening of Exhalation Valve. American Journal of Respiratory and Critical Care Medicine. 2002;166(1):21-30. DOI |
24 | Bernstein G, Cleary JP, Heldt GP, Rosas JF, Schellenberg LD, Mannino FL. Response Time and Reliability of Three Neonatal Patient-triggered Ventilators. American Review of Respiratory Disease. 1993;148:358. DOI |
25 | Ferguson NM, Cummings DAT, Fraser C, Cajka JC, Cooley PC, Burke DS. Strategies for mitigating an influenza pandemic. Nature. 2006;442(7101):448-452. DOI |
26 | https://www.worldometers.info/coronavirus/country/india, Accessed on May. 13, 2021. |
27 | https://www.bbc.com/news/world-asia-india-56891016, Accessed on Jun. 15, 2021. |
28 | Pagani LG, Carulli P, Zega V, Suriano R, Bernasconi R, Frangi A, Levi M, Magagnin L, Langfelder G. The First Three-Dimensional Printed and Wet-Metallized Coriolis Mass Flowmeter. IEEE Sensors Letters. 2020;4(6):1-4. |
29 | Wei Ji, Wei Wang, Xiaofang Zhao, Junjie Zai, Xingguang Li. Cross-species transmission of the newly identified coronavirus 2019-nCoV. Journal of medical virology. 2020;92(4):433-440. DOI |
30 | Jones JH. Notes on R0. California: Department of Anthropological Sciences 2007;323:1-19. |
31 | Fraser C, Donnelly CA, Cauchemezs, Hanage WP, Van Kerkhove MD, Hollingsworth TD, Griffin J, Baggaley RF, Jenkins HE, Lyons EJ, Jombart T, Hinsley WR, Grassly NC, Balloux F, Ghani AC, Ferguson NM, Rambaut A, Pybus OG, LopezGatell H, Alpuche-Aranda CM, Chapela IB, Zavala EP, Guevara DME, Checchi F, Garcia E, Hugonnet S, Roth C, The WHO Rapid Pandemic Assessment Collaboration. Pandemic potential of a strain of influenza A (H1N1): early findings. Science. 2009;324(5934):1557-1561. DOI |
32 | https://www.cdc.gov/coronavirus/2019-ncov/symptoms-testing/symptoms.html, Accessed on Mar. 3, 2021. |
33 | http://ncov.mohw.go.kr/bdBoardList_Real.do, Accessed on Jan. 14, 2021. |
34 | Carfi A, Bernabei R, Landi F. Persistent symptoms in patients after acute COVID-19. Jama. 2020;324(6):603-605. DOI |
35 | ECCLESTON-TURNER, M. A. R. K., Upton H. International Collaboration to Ensure Equitable Access to Vaccines for COVID-19: The ACT-Accelerator and the COVAX Facility. The Milbank Quarterly. 2021;99(2):426-449. DOI |