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http://dx.doi.org/10.9718/JBER.2009.30.6.453

Dynamic Flow Lithography Technologies  

Chung, Su-Eun (School of Electrical Engineering and Computer Science, Seoul National University)
Park, Wook (School of Electrical Engineering and Computer Science, Seoul National University)
Kwon, Sung-Hoon (School of Electrical Engineering and Computer Science, Seoul National University)
Publication Information
Journal of Biomedical Engineering Research / v.30, no.6, 2009 , pp. 453-460 More about this Journal
Abstract
In this review paper, concepts in optofluidics are applied to an advanced manufacturing technology based on self-assembled microparts. The "optical" aspect of optofluidics will be described in the context of photolithography, and the "fluidic" aspect will be discussed in the context of self-assembly. First, optofluidic maskless lithography will be introduced as a dynamic fabrication method to generate microparticles in microfluidic channels. Next, the history and application of optofluidic lithography will be presented.
Keywords
Photolithography; Microfluidics; Microparticle; Maskless lithography; Flow-lithography; Optofluidic maskless lithography;
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1 T. Thorsen, R.W. Roberts, F.H. Arnold, et al.,"Dynamic pattern formation in a vesicle-generating microfluidic device." Phys. Rev. Lett. vol. 86, pp.4163-4166, 2001   DOI   ScienceOn
2 S.L. Anna, N. Bontoux & H.A. Stone, "Formation of dispersions using “flow focusing” in microchannels." Appl. Phys. Lett. vol. 82, pp.364-366, 2003   DOI   ScienceOn
3 Z.H. Nie, S.Q. Xu, M. Seo, et al., "Polymer particles with various shapes and morphologies produced in continuous microfluidic reactors." J. Amer. Chem. Soc. vol. 127, pp.8058-8063, 2005   DOI   ScienceOn
4 A.S. Utada, E. Lorenceau, D.R. Link, et al., "Monodisperse double emulsions generated from a microcapillary device." Science. vol. 308, pp.537-541, 2005   DOI   ScienceOn
5 T. Nisisako, T. Torii, T. Takahashi, et al., "Synthesis of monodisperse bicolored janus particles with electrical anisotropy using a microfluidic co-flow system." Adv. Mater. vol. 18, pp. 1152-+, 2006   DOI   ScienceOn
6 O.D. Velev, A.M. Lenhoff & E.W. Kaler, "A class of microstructured particles through colloidal crystallization." Science. vol. 287, pp.2240-2243, 2000   DOI   ScienceOn
7 D.J. Beebe, "Functional hydrogel structures for autonomous flow control inside microfluidic channels." Nature. vol. 404, pp.588-590, 2000   DOI   ScienceOn
8 C. Decker & A.D. Jenkins, "Kinetic Approach of O-2 Inhibition in Ultraviolet-Induced and Laser-Induced Polymerizations." Macromolecules. vol. 18, pp.1241-1244, 1985   DOI
9 P. Panda, S. Ali, E. Lo, et al., "Stop-flow lithography to generate cell-laden microgel particles." Lab Chip. vol., pp.-, 2008
10 L.J. Hornbeck. Digital Light Processing TM for High-Brightness, High-Resolution Applications. Vol. 3013 27-40 (1997)
11 R.N.I. http://www.nimblegen.com/technology/manufacture.html
12 C. Sun, N. Fang, D.M. Wu, et al., "Projection micro-stereolithography using digital micro-mirror dynamic mask." Sens. Actuat. A. vol. 121, pp.113-120, 2005   DOI   ScienceOn
13 S. Singh-Gasson, R. D. Green, Y. Yue, et al., "Maskless fabrication of light-directed oligonucleotide microarrays using a digital micromirror array." Nat. Biotech. vol. 17, pp.974-978, 1999   DOI   ScienceOn
14 G.M. Whitesides, E. Ostuni, S. Takayama, et al., "Soft lithography in biology and biochemistry." Ann. Rev. Biomed. Eng. vol. 3, pp.335-373, 2001   DOI   ScienceOn
15 A. M. Biswas, J. Li, J. A. Hiserote, et al., "Extension of 193nm dry lithography to 45-nm half-pitch node: double exposure and double processing technique." Proceedings of SPIE. vol. 6349, pp.63491P, 2006
16 G.F. Christopher & S.L. Anna, "Microfluidic methods for generating continuous droplet streams." J. Phys. D. vol. 40, pp.R319-R336, 2007   DOI   ScienceOn
17 B.T. Kelly, J.C. Baret, V. Taly, et al., "Miniaturizing chemistry and biology in microdroplets." Chem. Commun. vol., pp.1773-1788, 2007
18 B. Zheng, J.D. Tice & R.F. Ismagilov, "Formation of droplets of in microfluidic channels alternating composition and applications to indexing of concentrations in droplet-based assays." Anal. Chem. vol. 76, pp.4977-4982, 2004   DOI   ScienceOn
19 S. Okushima, T. Nisisako, T. Torii, et al., "Controlled production of monodisperse double emulsions by two-step droplet breakup in microfluidic devices." Langmuir. vol. 20, pp.9905-9908, 2004   DOI   ScienceOn
20 S.Q. Xu, Z.H. Nie, M. Seo, et al., "Generation of monodisperse particles by using microfluidics: Control over size, shape, and composition." Angew. Chem. vol. 44, pp.724-728, 2005   DOI   ScienceOn
21 J.D. Tice, H. Song, A.D. Lyon, et al., "Formation of droplets and mixing in multiphase microfluidics at low values of the Reynolds and the capillary numbers." Langmuir. vol. 19, pp.9127-9133, 2003   DOI   ScienceOn
22 A. Bertsch, J.Y. J??uel & J.C. Andr, "Study of the spatial resolution of a new 3D microfabrication process: the microstereophotolithography using a dynamic mask-generator technique." J. Photochem. Photobiol. A. vol. 107, pp.275-281, 1997   DOI   ScienceOn
23 L.F. Cheow, L. Yobas & D.L. Kwong, "Digital microfluidics:Droplet based logic gates." Appl. Phys. Lett. vol. 90, pp.-, 2007
24 D.C. Pregibon, M. Toner & P.S. Doyle, "Multifunctional encoded particles for high-throughput biomolecule analysis." Science. vol. 315, pp.1393-1396, 2007   DOI   ScienceOn
25 D. Dendukuri, K. Tsoi, T.A. Hatton, et al., "Controlled synthesis of nonspherical microparticles using microfluidics." Langmuir. vol. 21, pp.2113-2116, 2005   DOI   ScienceOn
26 Y.S. Cho, G.R. Yi, J.M. Lim, et al., "Self-organization of bidisperse colloids in water droplets." J. Amer. Chem. Soc. vol. 127, pp.15968-15975, 2005   DOI   ScienceOn
27 V.N. Manoharan, M.T. Elsesser & D.J. Pine, "Dense packing and symmetry in small clusters of microspheres." Science. vol. 301, pp.483-487, 2003   DOI   ScienceOn
28 S. A. Lee, S. E. Chung, W. Park, et al., "Three-dimensional fabrication of heterogeneous microstructures using soft membrane deformation and optofluidic maskless lithography." Lab Chip. vol. 9, pp.1670-1675, 2009   DOI   ScienceOn
29 K. Totsu, K. Fujishiro, S. Tanaka, et al., "Fabrication of threedimensional microstructure using maskless gray-scale lithography." Sens. Actuat. A. vol. 130-131, pp.387-392, 2006   DOI   ScienceOn
30 T. Nisisako, T. Torii & T. Higuchi, "Droplet formation in a microchannel network." Lab Chip. vol. 2, pp.24-26, 2002   DOI   ScienceOn
31 M. Seo, Z.H. Nie, S.Q. Xu, et al., "Microfluidics: From dynamic lattices to periodic arrays of polymer disks." Langmuir. vol. 21, pp.4773-4775, 2005   DOI   ScienceOn
32 W. Jeong, J. Kim, S. Kim, et al., "Hydrodynamic microfabrication via “on the fly” photopolymerization of microscale fibers and tubes." Lab Chip. vol. 4, pp.576-580, 2004   DOI   ScienceOn
33 A.D. Griffiths & D.S. Tawfik, "Miniaturising the laboratory in emulsion droplets." Trends in Biotech. vol. 24, pp.395-402, 2006   DOI   ScienceOn
34 T. Nisisako, T. Torii & T. Higuchi, "Novel microreactors for functional polymer beads." Chem. Eng. J. vol. 101, pp.23-29, 2004   DOI   ScienceOn
35 W.J. Jeong, J.Y. Kim, J. Choo, et al., "Continuous fabrication of biocatalyst immobilized microparticles using photopolymerization and immiscible liquids in microfluidic systems." Langmuir. vol. 21, pp.3738-3741, 2005   DOI   ScienceOn
36 D. Dendukuri, Pregibon, D.C., Collins, J., Hatton, T.A. & Doyle, P.S., "Continuous-flow lithography for high-throughput microparticle synthesis." Nat. Mater. vol. 5, pp.365-369, 2006   DOI   ScienceOn
37 Y. Lu, G. Mapili, G. Suhali, et al., "A digital micromirror devicebased system for the microfabrication of complex, spatially patterned tissue engineering scaffolds." J. Biomed. Mater. Res. A. vol. 77, pp.396-405, 2006
38 M. Klosner & K. Jain, "Massively parallel, large-area maskless lithography." vol. 84, pp.2880, 2004
39 P.C. Lewis, R.R. Graham, Z.H. Nie, et al., "Continuous synthesis of copolymer particles in microfluidic reactors." Macromolecules. vol. 38, pp.4536-4538, 2005   DOI   ScienceOn
40 Y.N. Xia & G.M. Whitesides, "Soft lithography." Angew. Chem. vol. 37, pp.551-575, 1998
41 D. Dendukuri, S.S. Gu, D.C. Pregibon, et al., "Stop-flow lithography in a microfluidic device." Lab Chip. vol. 7, pp.818-828, 2007   DOI   ScienceOn
42 Y.D. Yin & Y.N. Xia, "Self-assembly of monodispersed spherical colloids into complex aggregates with well-defined sizes, shapes, and structures." Adv. Mater. vol. 13, pp.267-+, 2001   DOI   ScienceOn
43 P. Garstecki, I. Gitlin, W. DiLuzio, et al., "Formation of monodisperse bubbles in a microfluidic flow-focusing device." Appl. Phys. Lett. vol. 85, pp.2649-2651, 2004   DOI   ScienceOn
44 C.J. Hernandez & T.G. Mason, "Colloidal alphabet soup: Monodisperse dispersions of shape-designed LithoParticles." J. Phys. Chem. C. vol. 111, pp.4477-4480, 2007   DOI   ScienceOn