Browse > Article
http://dx.doi.org/10.9725/kts.2020.36.1.1

A Review on Transfer Process of Two-dimensional Materials  

Kim, Chan (Dept. of Nano-Mechatronics, University of Science and Technology (UST))
Yoon, Min-Ah (Dept. of Nano-Mechatronics, University of Science and Technology (UST))
Jang, Bongkyun (Nano-Convergence Mechanical System Research Division, Korea Institute of Machinery & Materials (KIMM))
Kim, Jae-Hyun (Dept. of Nano-Mechatronics, University of Science and Technology (UST))
Kim, Kwang-Seop (Dept. of Nano-Mechatronics, University of Science and Technology (UST))
Publication Information
Tribology and Lubricants / v.36, no.1, 2020 , pp. 1-10 More about this Journal
Abstract
Large-area two-dimensional (2D) materials synthesized by chemical vapor deposition on donor substrates are promising functional materials for conductors, semiconductors, and insulators in flexible and transparent devices. In most cases, 2D materials should be transferred from a donor substrate to a target substrate; however, 2D materials are prone to damage during the transfer process. The damages to 2D materials during transfer are caused by contamination, tearing, and chemical doping. For the commercialization of 2D materials, a damage-free, large-area, and productive transfer process is needed. However, a transfer process that meets all three requirements has yet to be developed. In this paper, we review the recent progress in the development of transfer processes for 2D materials, and discuss the principles, advantages, and limitations of each process. The future prospects of transfer processes are also discussed. To simplify the discussion, the transfer processes are classified into four categories: wet transfer, dry transfer, mechanical transfer, and electro-chemical transfer. Finally, the "roll-to-roll" and "roll-to-plate" dry transfer process is proposed as the most promising method for the commercialization of 2D materials. Moreover, for successful dry transfer of 2D materials, it is necessary to clearly understand the adhesion properties, viscoelastic behaviors, and mechanical deformation of the transfer film used as a medium in the transfer process.
Keywords
2D materials; transfer process; chemical-vapor deposition;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Park, H., Brown, P. R., Bulovic, V., Kong, J., "Graphene as transparent conducting electrodes in organic photovoltaics: studies in graphene morphology, hole transporting layers, and counter electrodes", Nano Lett., 2012, https://doi.org/10.1021/nl2029859
2 Gong, C., Floresca, H. C., Hinojos, D., Mcdonnell, S., Qin, X., Hao, Y., Jandhyala, S., Mordi, G., Kim, J., Colombo, L., Ruoff, R. S., Kim, M. J., Cho, K., Wallace, R. M., Chabal, Y. J., "Rapid selective etching of PMMA residues from transferred graphene by carbon dioxide", J. Phys. Chem. C, 2013, https://doi.org/10.1021/jp408429v
3 Suk, J. W., Lee, W. H., Lee, J., Chou, H., Piner, R. D., Hao, Y., Akinwande, D., Ruoff, R. S., "Enhancement of the electrical properties of graphene grown by chemical vapor deposition via controlling the effects of polymer residue", Nano Lett., 2013, https://doi.org/10.1021/nl304420b
4 Jeong, H. J., Kim, H. Y., Jeong, S. Y., Han, J. T., Baeg, K. J., Hwang, J. Y., Lee, G. W., "Improved transfer of chemical-vapor-deposited graphene throughmodification of intermolecular interactions and solubility of poly(methylmethacrylate) layers", Carbon, 2014, http://dx.doi.org/10.1016/j.carbon.2013.09.050
5 Barin, B. G., Song, Y., Gimenez, L. D. F., Filho, A. G. S., Barreto, L. S., Kong, J., "Optimized graphene transfer: influence of polymethylmethacrylate (PMMA)layer concentration and baking time on graphene finalperformance", Carbon, 2015, https://dx.doi.org/10.1016/j.carbon.2014.11.040
6 Deokar, G., Avila, J., Razado-Colambo, I., Codron, J. L., Botaval, C., Galopin, E., Asensio, M. C., Vignaud, D., "Towards high quality CVD graphene growthand transfer", Carbon, 2015, https://dx.doi.org/10.1016/j.carbon.2015.03.017
7 Han, Y., Zhang, L., Zhang, X., Ruan, K., Cui, L., Wang, Y., Liao, L., Wang, Z., Jie, J., "Clean surfacetransfer of graphene film via an effective sandwich method for organic light emitting diode applications", J. Mater. Chem. C, 2014, https://doi.org/10.1039/c3tc31722f
8 Kim, H. H., Kang, B., Suk, J. W., Li, N., Kim, K. S., Ruoff, R. S., Lee, W. H., Cho, K., "Clean transfer of wafer-scale graphene via liquid phase removal of polycyclic aromatic hydrocarbons", ACS nano, 2015, https://doi.org/10.1021/nn5066556
9 Ngoc, H. V., Qian, Y., Han, S. K., Kang, D. J., "PMMA-etching-free transfer of wafer-scale chemical vapor deposition two-dimensional atomic crystal by a water soluble polyvinyl alcohol polymer method", Sci. Rep., 2016, https://doi.org/10.1038/srep33096
10 Shin, S., Kim, S., Kim, T., Du, H., Kim, K. S., Cho, S., Seo, S., "Graphene transfer with self-doping by amorphous thermoplastic resins", Carbon, 2017, http://dx.doi.org/10.1016/j.carbon.2016.09.077
11 Zhang, Z., Du, J., Zhang, D., Sun, H., Yin, L., Ma, L., Chen, J., Ma, D., Cheng, H. M., Ren, W., "Rosin-enabled ultraclean and damage-free transfer of graphene for large-area flexible organic light-emitting diodes", Nat. Comm., 2017, https://doi.org/10.1038/ncomms14560
12 Leong, W. S., Wang, H., Yeo, J., Martin-Martinez, F. J., Zubair, A., Shen, P. C., Mao, Y., Palacios, T., Buehler, M. J., Hong, J. Y., Kong, J., "Paraffin-enabled graphene transfer", Nat. Comm., 2019, https://doi.org/10.1038/s41467-019-08813-x
13 Allen, B. M. J., Tung, V. C., Gomez, L., Xu, Z., Chen, L. M., Nelson, K. S., Zhou, C., Kaner, R. B., Yang, Y., "Soft transfer printing of chemically converted graphene", Adv. Mater., 2009, https://doi.org/10.1002/adma.200803000
14 Bae, S., Kim, H., Lee, Y., Xu, X., Park, J. S., Zheng, Y., Balakrishnan, J., Lei, T., Kim, H. R., Song, Y. I., Kim, Y. J., Kim, K. S., Ozyilmaz, B., Ahn, J. H., Hong, B. H., Iijima, S., "Roll-to-roll production of 30-inch graphene films for transparent electrodes", Nature Nanotechnol., 2010, https://doi.org/10.1038/nnano.2010.132
15 Lee, Y., Bae, S., Jang, H., Jang, S., Zhu, S. E., Sim, S. H., Song, Y. I., Hong, B. H., Ahn, J. H., "Wafer-scale synthesis and transfer of graphene films", Nano Lett., 2010, https://doi.org/10.1021/nl903272n
16 Ni, G. X., Zheng, Y., Bae, S., Kim, H. R., Pachoud, A., Kim, Y. S., Tan, C. L., Im, D., Ahn, J. H., Hong, B. H., Ozyilmaz, B., "Quasi-periodic nanoripples in graphene grown by chemical vapor deposition and its impact on charge transport", ACS Nano, 2012, https://doi.org/10.1021/nn203775x
17 Kim, D. W., Lee, J., Kim, S. J., Jeon, S., Jung, H. T., "The effects of the crystalline orientation of Cu domains on the formation of nanoripple arrays in CVD-grown graphene on Cu", J. Mater. Chem., 2013, https://doi.org/10.1039/c3tc31717j
18 Kang, J., Hwang, S., Kim, J. H., Kim, M. H., Ryu, J., Seo, S. J., Hong, B. H., Kim, M. K., Choi, J. B., "Efficient transfer of large-area graphene films onto rigid substrates by hot pressing", ACS nano, 2012, https://doi.org/10.1021/nn301207d
19 Song, J., Kam, F. Y., Png, R. Q., Seah, W. L., Zhuo, J. M., Lim, G. K., Ho, P. K. H., Chua, L. L., "A general method for transferring graphene onto soft surfaces", Nature Nanotechnol., 2013, https://doi.org/10.1038/nnano.2013.63
20 Chen, X. D., Liu, Z B., Zheng, C. Y., Xing, F., Yan, X. Q., Chen, Y., Tian, J. G., "High-quality and efficient transfer of large-area graphene films onto different substrates", Carbon, 2013, https://dx.doi.org/10.1016/j.carbon.2013.01.011
21 Juang, Z. Y., Wu, C. Y., Lu, A. Y., Su, C. Y., Leou, K. C., Chen, F. R., Tsai, C. H., "Graphene synthesis by chemical vapor deposition and transfer by a roll-to-roll process", Carbon, 2010, https://doi.org/10.1016/j.carbon.2010.05.001
22 Choi, T., Kim, S. j., Park, S., Hwang, T. Y., Jeon, Y., Hong, B. H., "Roll-to-roll continuous patterning and transfer of graphene via dispersive adhesion", Nanoscale, 2015, https://doi.org/10.1039/c4nr06991a
23 Lim, Y. R., Han, J. K., Kim, S. K., Lee, Y. B., Yoon, Y., Kim, S. J., Min, B. K., Kim, Y., Jeon, C., Won, S., Kim, J. H., Song, W., Myung, S., Lee, S. S., An, K. S., Lim, J., "Roll-to-roll production of layer-controlled molybdenum disulfide: a platform for 2D semiconductor-based industrial applications", Adv. Mater., 2018, https://doi.org/10.1002/adma. 201705270
24 Kim, S. J., Choi, T., Lee, B., Lee, S., Choi, K., Park, J. B., Yoo, J. M., Choi, Y. S., Ryu, J., Kim, P., Hone, J., Hong, B. H., "Ultraclean patterned transfer of single-layer graphene by recyclable pressure sensitive adhesive films", Nano Lett., 2015, https://doi.org/10.1021/acs.nanolett.5b00440
25 Chandrashekar, B. N., Deng, B., Smitha, A. S., Chen, Y., Tan, C., Zhang, H., Peng, H., Liu, Z., "Roll-to-roll green transfer of CVD graphene onto plastic for a transparent and flexible triboelectric nanogenerator", Adv. Mater., 2015, https://doi.org/10.1002/adma.201502560
26 Chandrashekar, B. N., Smitha, A. S., Wu, Y., Cai, N., Li, Y., Huang, Z., Wang, W., Shi, R., Wang, J., Liu, S., Krishnaveni, S., Wang, F., Cheng, C., "A universal stamping method of graphene transfer for conducting flexible and transparent polymers", Sci. Rep., 2019, https://doi.org/10.1038/s41598-019-40408-w
27 Tanabe, S., Furukawa, K., Hibino, H., "Etchant-free and damageless transfer of monolayer and bilayer graphene grown on SiC", Jpn. J. Appl. Phys., 2014, https://dx.doi.org/10.7567/jjap.53.115101
28 Kim, K. K., Hsu, A., Jia, X., Kim, S. M., Shi, Y., Hofmann, M., Nezich, D., Rodriguez-Nieva, J. F., Dresselhaus, M., Palacios, T., "Synthesis of monolayer hexagonal boron nitride on Cu foil using chemical vapor deposition", Nano Lett., 2011, https://doi.org/10.1021/nl203249a
29 Yang, S. Y., Oh, G. J., Jung, D. Y., Choi, H., Yu, C. H., Shin, J., Choi, C. G., Cho, J. B., Choi, S. Y., "Metal-etching-free direct delamination and transfer of single-layer graphene with a high degree of freedom", Small, 2015, https://doi.org/10.1002/smll.201401196
30 Li, T., Li, H., Gao, Y., Chen, Z., Wang, L., Deng, Y., Zhang, J., Xu, J. B., "Deterministic and etching-free transfer of large-scale 2D layered materials for constructing interlayer coupled Van der Waals heterostructures", Adv. Mater. Technol., 2018, https://doi.org/10.1002/admt.201700282
31 Lee, J. S., Choi, S. H., Yun, S. J., Kim, Y. I., Boandoh, S., Park, J. H., Shin, B. G., Ko, H., Lee, S. H., Kim, Y. M., Lee, Y. H., Kim, K. K., Kim, S. M., "Wafer-scale single-crystal hexagonal boron nitride film via self-collimated grain formation", Science, 2009, https://doi.org/10.1126/science.aau2132
32 Zhan, Y., Liu, Z., Najmaei, S., Ajayan, P. M., Lou, J., "Large-area vapor-phase growth and characterization of $MoS_2$ atomic layers on a $SiO_2$ substrate", Small, 2009, https://doi.org/10.1002/smll.201102654
33 Na, S. R., Suk, J. W., Tao, L., Akinwande, D., Ruoff, R. S., Huang, R., Liechti, K. M., "Selective mechanical transfer of graphene from seed copper foil using rate effects", ACS Nano, 2015, https://doi.org/10.1021/nn505178g
34 Shivayogimath, A., Whelan, P. R., Mackenzie, D. M. A., Luo, B., Huang, D., Luo, D., Wang, M., Gammelgaard, L., Shi, H., Ruoff, R. S., Boggild, P., Booth, T. J., "Do-it-yourself transfer of large-area graphene using and office laminator and water", Chem. Mater., 2019, https://doi.org/10.1021/acs.chemmater.8b04196
35 Wang, R., Purdie, D. G., Fan, Y., Massabuau, F. C. P., Braeuninger-Weimer P., Burton, O. J., Blume, R., Schloegl, R., Lombardo, A., Weatherup, R. S., Hofmann, S., "A peeling approach for integrated manufacturing of large monolayer h-BN crystal", ACS Nano, 2019, https://dx.doi.org/10.1021/acsnano.8b08712
36 Yoon, T., Shin, W. C., Kim, T. Y., Mun, J. H., Kim, T. S., Cho, B. J., "Direct measurement of adhesion energy of monolayer graphene as-grown on copper and its application to renewable transfer process", Nano Lett., 2012, https://dx.doi.org/10.1021/nl204123h
37 Kang, S., Yoon, T., Kim, S., Kim, T. S., "Role of crack deflection on rate dependent mechanical transfer of multilayer graphene and its application to transparent electrodes", ACS Appl. Nano Mater., 2019, https://doi.org/10.1021/acsanm.9b00014
38 Wang, Y., Zheng, Y., Xu, X., Dubuisson, E., Bao, Q., Lu, J., Loh, K. P., "Electrochemical delamination of CVD-grown graphene film: toward the recyclable use of copper catalyst", ACS Nano, 2011, https://doi.org/10.1021/nn203700w
39 Gao, L., Ren, W., Xu, H., Jin, L., Wang, Z., Ma, T., Ma, L. P., Zhang, Z., Fu, Q., Peng, L. M., Bao, X., Cheng, H. M., "Repeated growth and bubbling transfer of graphene with millimeter-size single-crystal grains using platinum", Nat. Comm., 2012, https://doi.org/10.1038/ncomms1702
40 Kang, K., Xie, S., Huang, L., Han, Y., Huang, P. Y., Mak, K. F., Kim, C. J., Muller, D., Park, J., "High-mobility three-atom-thick semiconducting films with wafer-scale homogeneity", Nature, 2015, https://doi.org/10.1038/nature14417
41 Whag, L., Xu, X., Zhang, L., Qiao, R., Wu, M., Wang, Z., Zhang, S., Liang, J., Zhang, Z., Zhang, Z., Chen, W., Xie, X., Zong, J., Shan, Y., Guo, Y., Willinger, M., Wu, H., Li, Q., Wang, W., Peng, G., Wu, S., Zhang, Y., Jiang, Y., Yu, D., Wang, E., Bai, X., Wang, Z. J., Ding, F., Liu, K., "Epitaxial growth of a 100-square-centimetre single-crystal hexagonal boron nitridemonolayer on copper", Nature, 2019, https://doi.org/10.1038/s41586-019-1226-z
42 Chen, Y., Gong, X. L., Gai, J. G., "Progress and challenges in transfer of large-area graphene films", Adv. Sci., 2016, https://doi.org/10.1002/advs.201500343
43 Ma, L. P., Ren, W., Cheng, H. M., "Transfer methods of graphene from metal substrates: a review", Small Method, 2019, https://doi.org/10.1002/smtd.201900049
44 Park, S., "The puzzle of graphene commercialization", Nat. Rev. Mater., 2016, https://doi.org/10.1038/natrevmats.2016.85
45 Deng, B., Liu, Z., Peng, H., "Toward mass production of CVD graphene films", Adv. Mater., 2019, https://doi.org/10.1002/adma.201800996
46 Bae, S. H., Kum, H., Kong, W., Kim, Y., Choi, C., Lee, B., Lin, P., Park, Y., Kim, J., "Integration of bulkmaterials with two-dimensional materials for physical coupling and applications", Nat. Mater., 2019, https://doi.org/10.1038/s41563-019-0335-2
47 Li, X., Zhu, Y., Cai, W., Borysiak, M., Han, B., Chen, D., Piner, R. D., Colombo, L., Ruoff, R. S., "Transfer of large-area graphene films for high performance transparent conductive electrodes", Nano Lett., 2009, https://doi.org/10.1021/nl902623y
48 "Expanding our 2D vision", Nat. Rev. Mater., 2016, https://doi.org/10.1038/natrevmats.2016.89
49 Geim, A. K., Novoselov, K. S., "The rise of graphene", Nat. Mater., 2007, https://doi.org/10.1038/nmat1849
50 Geim, A. L., Grigorieva, I. V., "Van der Waals heterostructures", Nature, 2013, https://doi.org/10.1038/nature12385
51 Kim, K. S., Zhao, Y., Jang, H., Lee, S. Y., Kim, J. M. Kim, K. S., Ahn, J. H., Kim, P., Choi, J. Y., Hong, B. H., "Large-scale pattern growth of graphene films for stretchable transparent electrodes", Nature, 2009, https://doi.org/10.1038/nature07719
52 Liang, X., Sperling, B. A., Calizo, I., Cheng, g., Hacker, C. A., Zhang, Q., Obeng, Y., Yan, K., Peng, H., Li, Q., Zhu, X., Yuan, H., Walker, A. R. H., Liu, Z., Peng, L. M., Richter, C. A., "Toward clean and crackles transfer of graphene", ACS Nano, 2011, https://doi.org/10.1021/nn203377t
53 Shinde, S. M., Das, T., Hoang, A. T., Sharma, B. K., Chen, X., Ahn, J. H., "Surface-functionalization-mediated direct transfer of molybdenum disulfide for large-area flexible devices", Adv. Funct. Mater., 2018, https://doi.org/10.1002/adfm.201706231
54 Pirkle, A., Chan, J., Venugopal, A., Hinojos, D., Magnuson, C. W., McDonnel, S., Colombo, L., Vogel, E. M., Ruoff, R. S., Wallace, R. M., "The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to $SiO_2$", Appl. Phys. Lett., 2011, https://doi.org/10.1063/1.3643444
55 Lin, Y. C., Jin, C., Lee, J. C., Jen, S. F., Suenaga, K., Chiu, P. W., "Clean transfer of graphene for isolation and suspension", ACS Nano, 2011, https://doi.org/10.1021/nn200105j
56 Lin, Y. C., Lu, C. C., Yeh, C. H., Jin, C., Suenaga, K., Chiu, P. W., "Graphene annealing: how clean can itbe?", Nano Lett., 2012, https://doi.org/10.1021/nl203733r
57 Cherian, C. T., Giustiniano, F., Martin-Fernandez, I., Andersen, H., Balakrishnan, J., Ozyilmaz, B., 'Bubble-free' electrochemical delamination of CVD graphene films", Small, 2015, https://doi.org/10.1002/smll.201402024
58 Pizzocchero, F., Jessen, B. S., Whelan, P. R., Kostesha, N., Lee, S., Buron, J. D., Petrushina, I., Larsen, M. B., Greenwood, P., Cha, W. J., Teo, K., Jepsen, P. U., Hone, J., Boggild, P., Booth, T. J., "Non-destructive electrochemical graphene transfer from reusable thin-film catalyst", Carbon, 2015, https://dx.doi.org/10.1016/j.carbon.2014.12.061
59 Wang, D. Y., Huang, I. S., Ho, P. H., Li, S. S., Yeh, Y. C., Wang, D. W., Chen, W. L., Lee, Y. Y., Chang, Y. M., Chen, C. C., Liang, C. T., Chen, C. W., "Clean-lifting transfer of large-area residual-free graphene films", Adv. Mater., 2013, https:// doi.org/10.1002/adma.201301152
60 Li, X., Cai, W., An, J., Kim, S., Nah, J., Yang, D., Piner, R., Velamakanni, A., Jung, I., Tutuc, E., Banerjee, S. K., Colombo, L., Ruoff, R. S., "Large-area synthesis of high-quality and uniform graphene films on copper foils", Science, 2009, https://doi.org/10.1126/science.1171245
61 Lin, W. H., Chen, T. H., Chang, J. K., Taur, J. I., Lo, Y. Y., Lee, W. L., Chang, C. S., Su, W. B., Wu, C. I., "A direct and polymer-free method for transferring graphene grown by chemical vapor deposition to any substrate", ACS Nano, 2014, https://doi.org/10.1021/nn406170d
62 Seo, J. Kim, C., Ma, B. S., Lee, T. I., Bong, J. H., Oh, J. G., Cho, B. J., Kim, T. S., "Direct graphene transfer and target substrate application to transfer printing using mechanically controlled, large area graphene/copper freestanding layer", Adv. Funct. Mater., 2018, https://doi.org/10.1002/adfm.201707102
63 Zhang, G., Guell, A. G., Kirkman, P. M., Lazenby, R. A., Miller, T. S., Unwin, P. R., "Versatile polymer-free graphene transfer method and applications", ACS Appl. Mater. Interfaces, 2016, https://doi.org/10.1021/acsami.6b00681
64 Hempel, M., Lu, A. Y., Hui, F., Kpulun, T., Lanza, M., Harris, G., Palacios, T., Kong, J., "Repeated roll-to-roll transfer of two-dimensional materials by electrochemical delamination", Nanoscale, 2018, https://doi.org/10.1039/c7nr07369k
65 Jang, B., Kim, C. H., Choi, S. T., Kim, K. S., Kim, K. S., Lee, H. J., Cho, S., Ahn, J. H., Kim, J. H., "Damage mitigation in roll-to-roll transfer of CVD-graphene to flexible substrates", 2D Mater., 2017, https://doi.org/10.1088/2053-1583/aa57fa
66 Yoon, M. A., Kim, C., Won, S., Jung, H. J., Kim, J. H., Kim, K. S., "Surface energy of graphene transferred by wet and dry transfer methods", Tribol. Lubr., 2019, https://doi.org/10.9725/kts.2019.35.1.9   DOI