1 |
Zorman, C. A., Mehregany, M., Material Aspects of Micro- and Nanoelectromechanical Systems. In: Bhushan B. (eds.) Springer Handbook of Nanotechnology, Springer, Berlin Heidelberg, 2017. (ISBN: 978-3-662-54355-9)
|
2 |
Alper, S. E., Temiz, Y., Akin, T., "A compact angular rate sensor system using a fully decoupled silicon-on-glass MEMS gyroscope", J. Microelectromech.Syst., Vol.17, pp.1418-1429, 2008.
DOI
|
3 |
Bhushan, B., Micro/Nanotribology of MEMS/NEMSMaterials and Devices. In: Bhushan B. (eds.) Nanotribology and Nanomechanics. Springer, Berlin, Heidelberg, 2005. (ISBN: 978-3-540-24267-3)
|
4 |
Wang, L., Wang, F., Zhang, X., Wang, N., Jiang, Y., Hao, Q., Zhao, Y., "Improving efficiency of silicon heterojunction solar cells by surface texturing of silicon wafers using tetramethylammonium hydroxide", J. Power Sour., Vol. 268, pp. 619-624, 2014.
DOI
|
5 |
Basu, P. K., Sarangi, D., Shetty, K. D., Boreland, M. B., "Liquid silicate additive for alkaline texturing of mono-Si wafers to improve process bath lifetime and reduce IPA consumption", Solar Energy Mater. Solar Cells, Vol. 23, pp.1917-1928, 2014.
|
6 |
Amanov, A., Kwon, H. G., Pyun, Y. S., "The possibility of reducing the reflectance and improving the tribological behavior of Si wafer by UNSM technique", Tribol. Int., Vol.105, pp.175-184, 2017.
DOI
|
7 |
Reinhardt, K.A., Kern, W., Silicon Wafer Cleaning Technology, 3rd ed. William Andrew Inc., Norwich, USA, 2018. (ISBN: 978-0-323-51084-4)
|
8 |
Amanov, A., Pyun, Y. S., "Local heat treatment with and without ultrasonic nanocrystal surface modification of Ti-6Al-4V alloy: Mechanical and tribological properties", Surf. Coat. Technol., Vol. 326,pp.343-354, 2017.
DOI
|
9 |
Wu, X., Suzuki, M., Ohana, Y., Tanaka, A., "Characteristics and tribological properties in water of Si-DLC coatings", Diam. Relat. Mater., Vol. 17, Issue 1,pp.7-12, 2008.
DOI
|
10 |
Park, H., Kwon, S., Lee, J. S., Lim, H. J., Yoon, S., Kim, D., "Improvement on surface texturing of single crystalline silicon for solar cells by saw-damage etching using an acidic solution", Solar Energy Mater. Solar Cells, Vol. 93, pp.1773-1778, 2009.
DOI
|
11 |
Liu, L. H., Michalak, D. J., Chopra, T. P., Pujari, S. P., Cabrera, W., Dick, D., Veyan, J. F., Hourani, R., Halls, M. D., Zuilhof, H., Chabal, Y. J., "Surface etching, chemical modification and characterization of silicon nitride and silicon oxide - Selective functionalization of and ", J. Phys. Conden. Matt., Vol.28, 094014, 2016.
DOI
|
12 |
Wang, X., Kim, S. H., Chen, C., Chen, L., He, H., Qian, L., "Humidity dependence of tribochemical wearof monocrystalline silicon", ACS Appl. Mater. Interf.,Vol.7, pp.14785-14792, 2015.
DOI
|