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http://dx.doi.org/10.9725/kstle.2010.26.5.297

Study on the Formation of Residual Layer Thickness by Changing Magnitude and Period of UV Imprinting Pressure  

Shin, Dong-Hyuk (Graduate School of Automotive Engineering at Kookmin Univ.)
Jang, Si-Youl (School of Mechanical and Automotive Engineering, Kookmin Univ.)
Publication Information
Tribology and Lubricants / v.26, no.5, 2010 , pp. 297-302 More about this Journal
Abstract
This study is focused on the resin layer formation of UV imprinting process by changing imprinting pressure and period. The mold shape is made for the process of window open over the pattern transfer area and the imprinting period is assigned as the time just before the UV light curing. The residual layer is measured by changing the imprinting period and pressure magnitude, and the measured data of residual layer provides useful information for the design of the process conditions of imprinting processes.
Keywords
large area imprint; residual layer thickness; flatness of imprinting area; imprinting pressure; UV resin; mold;
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