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http://dx.doi.org/10.9725/kstle.2004.20.5.237

Micro/Nano Adhesion and Friction Characteristics of PTFE Coating Film Deposited by IBAD Method  

윤의성 (한국과학기술연구원 트라이볼로지 연구센터)
오현진 (한국과학기술연구원 트라이볼로지 연구센터)
한흥구 (한국과학기술연구원 트라이볼로지 연구센터)
공호성 (한국과학기술연구원 트라이볼로지 연구센터)
장경영 (한양대학교 기계공학부)
Publication Information
Tribology and Lubricants / v.20, no.5, 2004 , pp. 237-244 More about this Journal
Abstract
Micro/nano tribological characteristics of PTFE coating films were experimentally studied. PTFE (polytetrafluoroethylene) modified polyethylene and low molecular weight PTFE were used as a coating materials. These films were deposited on Si-wafer (100) by IBAD (ion beam assisted deposition) method. The Ar ion beam sputtering was performed to change the surface topography of films using a hollow cathode ion gun under different Ar ion dose conditions in a vacuum chamber. Micro/nano tribological characteristics, water wetting angles and roughness were measured with a micro tribotester, SPM (scanning probe microscope), contact anglemeter and profilometer, respectively. The durability of the films were measured with macro tribotester. Results showed that the PTFE coating surfaces were converted to hydrophobic. The water contact angle of coated surfaces and surface roughness increased with the coating thickness. Adhesion and friction in micro and nano scale were governed by magnitude of normal load in soft material such as PTFE films. As the increase of sputtering time on low molecular weight PTFE films, the surface roughness was increased and nano adhesion and friction were decreased. The nano tribological characteristics of surfaces are mainly improved by chemical modification such as PTFE coating and given a synergy effect by the physical modification such as topographic modification.
Keywords
nano; micro; adhesion; friction; hydrophobic film; IBAD; PTFE;
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  • Reference
1 Maboudian, R., Ashurst, W.R. and Carraro, C., 'Self-Assembled Monolayers as Anti-Stiction Coatings forMEMS,' Sensors and Actuators A: Physical, 82,219-223, 2000
2 Alley, R.L., Mai, P., Komvopoulos, K. and Howe,R.T., 'Surface Roughness Moditication of InterfacialContacts in Polysilicon Microstructures,' Proc. 7th Int.Conf. Solid-State Sensors and Actuators, Transducers'93, Yokohama, Japan, 288-291, 7-10 June 1993
3 Ando, Y. and Ino, J., 'The Effect of Asperity ArrayGeometry on Friction and Pull-Off Force,' Trans.ASME J. Tribol., 119, pp. 781-787, 1997
4 Bhushan, B., 'Nanoscale Tribo-Physics and Tribo-mechanics,' Wear, Vol. 225-229, pp. 465-492, 1999
5 Ando, Y. and Ino, J., 'Friction and Pull-Off Force onSilicon Surface Modified by FIB,' Sensors and Actu-ators A, Vol. 57, pp. 83-89, 1996
6 윤의성, 박지현, 양승호, 공호성, 장경영, 'IBAD로표면개질된 실리콘 표면의 나노 트라이볼로지적 특성.' 한국윤활학회지, 제18권 제1호, pp. 1-8, 2002
7 Kluth, G.J., Sander, M., Sung, M.M. and Maboudian,R., 'Study of the Desorption Mechanism of Alkylsi-loxane Self-Assembled Monolayers through Iso-Topic Labeling and High Resolution ElectronEnergy-Loss Spectroscopy Experiments,' J. Vac. Sci.Technol. A, Vol. 16, No. 3, pp. 932-936, 1998
8 Komvopoulos, K., 'Surface Engineering and Microt-ribology for Microelectro-Mechanical Systems,' Wear,Vol. 200, pp. 305-327, 1996
9 Sung, M.M., Kluth, G.J., Yauw, O.W. and Maboudian,R., 'Thermal Behavior of Alkyl-Monolayers on SiliconSurfaces,' Langmuir, Vol. 13, pp. 6164-6168, 1997
10 Carraro, C., Yauw, O.W., Sung, M.M. and Mabou-dian, R., 'Observation of Three Growth Mecha-nisms in Self-Assembled Monolayers,' The Journalof Physical Chemistry B, Vol. 102, No. 23, 1998
11 Ando. Y. Ishikawa, Y. and Kitahara, T, 'Friction Char-acteristics and Adhesion Force under Low NormalLoad,' Trans. ASME J. Tribol., 117, pp. 569-574, 1995
12 KIuth, G.J., Carraro, C. and Maboudian, R., 'DirectObservation of Sulfur Dimers in Alkanethiol Self-Assembled Monolayers on Au(lll),' Physical ReviewB, Vol. 59, No. 16, pp. 10449-10452, 1999
13 Tai, Y.C., Fan, L.S. and Muller. R.S., 'IC-ProcessedMicro-Motors: Design, Technology and Testing,'
14 Kluth, G. J., Sung, M.M. and Maboudian, R., 'Inter-action of H(D) Atoms with Octadecylsiloxane Self-Assembled Monolayers on the Si(lOO) Surface,'Langmuir, Vol. 13, pp. 6491-6496, 1997
15 Houston, M.R., Howe, R.T, Komvopoulos, K. andMaboudian, M., 'Diamond-Like Carbon Films forSilicon Passivation in Microelectromechanical Drives,'Mater. Res. Soc. Symp. Proc., 383, 391, 1995
16 Eui-Sung Yoon, Seung Ho Yang, Hung-Gu Han, Hyun-Jin Oh and Hosung Kong, 'Micro/Nano TribologicalCharacteristics of Thin Fluorocarbon Based Hydropho-bic Polymeric Coatings Deposited by IBAD Method,'14th International Conference of Wear of Materials,Washington DC. USA, March 30- April 3, 2003, pp. 28
17 Deng, K., Collins, R.J., Mehregany, M. and Sukenik,C.N., 'Performance Impact of Monolayer Coatingsof Polysilicon Micromotors,' Proc. MEMS 95,Amsterdam. Netherlands. Jan-Feb