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http://dx.doi.org/10.15207/JKCS.2019.10.11.085

Analyzing Technology Competitiveness by Country in the Semiconductor Cleaning Equipment Sector Using Quantitative Indices and Co-Classification Network  

Yoon, Seok Hoon (Department of Semiconductor and Display Science and Management, KOREATECH)
Ji, Ilyong (Department of IT Convergence Science and Management, KOREATECH)
Publication Information
Journal of the Korea Convergence Society / v.10, no.11, 2019 , pp. 85-93 More about this Journal
Abstract
Despite its matchless position in the global semiconductor industry, Korea has not distinguished itself in the semiconductor equipment sector. Semiconductor cleaning equipment is one of the semiconductor fabrication equipment, and it is expected to be more important along with the advancement of semiconductor fabrication processes. This study attempts to analyze technology competitiveness of major countries in the sector including Korea, and explore specialty sub-areas of the countries. For this purpose, we collected patents of semiconductor cleaning equipment during the last 10 years from the US patent database, and implemented quantitative patent analysis and co-classification network analysis. The result shows that, the US and Japan have been leading the technological progress in this sector, and Korea's competitiveness has lagged behind not only the leading countries but also its competitors and even latecomers. Therefore, intensive R&D and developing technological capabilities are needed for advancing the country's competitiveness in the sector.
Keywords
Semiconductor equipment; Cleaning equipment; Patent analysis; IPC; Network analysis;
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Times Cited By KSCI : 9  (Citation Analysis)
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