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A Study on Molecular Dynamics Method for Improving Characteristics of Ion Implantation  

Yang, Young-Joon (Department of Automotive Engineering, Jinju National University)
Lee, Chi-Woo (Department of Automotive Engineering, Jinju National University)
Publication Information
Journal of Energy Engineering / v.18, no.2, 2009 , pp. 125-131 More about this Journal
Abstract
Physical characteristics of metals such as hardness, wear-resistance and corrosion-resistance can be artificially controlled by ion implantation. The interaction between ion and solid surface was modeled in molecular scale and simulated by the molecular dynamics method in order to understand the ion implantation mechanism. From the microscopic point of view, the molecular behaviors were observed for improving characteristics of ion implantation. For these purposes, the implantation mechanism and the influences of incident energy, surface temperature and molecular weight were discussed in this study. As the results, the penetration probability was even decreased if incident energy was exceeded any values in the case of high temperature of solid surface. Moreover, it was confirmed that ion implantation into solid surface with amorphous state could be more effective for some conditions.
Keywords
Molecular dynamics method; Ion implantation; Incident energy; Molecular scale; Solid surface;
Citations & Related Records
Times Cited By KSCI : 5  (Citation Analysis)
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