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http://dx.doi.org/10.12656/jksht.2016.29.6.272

Influence of Ag Nano-buffer Layer Thickness on the Opto-electrical Properties of AZO/Ag Transparent Electrode Films  

Eom, Tae-Young (School of Materials Science and Engineering, University of Ulsan)
Song, Young-Hwan (School of Materials Science and Engineering, University of Ulsan)
Moon, Hyun-Joo (School of Materials Science and Engineering, University of Ulsan)
Kim, Dae-Hyun (Poongsan Holdings)
Cho, Yun-Ju (Poongsan Holdings)
Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
Publication Information
Journal of the Korean Society for Heat Treatment / v.29, no.6, 2016 , pp. 272-276 More about this Journal
Abstract
Al doped ZnO (AZO) single layer and AZO/Ag bi-layered films were deposited on the glass substrates by radio frequency and direct current magnetron sputtering and then the effect of Ag buffer layer on the electrical and optical properties of the films was investigated. The thicknesses of AZO upper layer was kept as 100 nm, while Ag buffer layer was varied from 5 to 15 nm. The observed results mean that opto-electrical properties of the AZO films is influenced with Ag buffer layer and AZO film with 10 nm thick Ag buffer layer show the higher opto-electrical performance than that of the AZO single layer film prepared in this study.
Keywords
AZO; Ag; Magnetron sputtering; AFM; Figure of merit;
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Times Cited By KSCI : 1  (Citation Analysis)
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