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http://dx.doi.org/10.12656/jksht.2014.27.5.225

Effect of Electron Irradiation on the Structural Electrical and Optical Properties of ITO/ZnO Thin Films  

Kim, Sun-Kyung (School of Materials Science and Engineering, University of Ulsan)
Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
Publication Information
Journal of the Korean Society for Heat Treatment / v.27, no.5, 2014 , pp. 225-229 More about this Journal
Abstract
The influence of electron irradiation energy(eV) on the structural, electrical and optical properties of ITO/ZnO bi-layered films prepared with RF magnetron sputtering has been investigated. The ITO/ZnO show the lowest resistivity of $2.8{\times}10^{-4}{\Omega}cm$. The optical transmittance in a visible wave length region also increased with the electron irradiation energy. The film irradiated at 900 eV shows 82---- of optical transmittance in this study. By comparison of figure of merit, it was observed the optical transmittance and electrical resistivity of the films were dependent on the electron irradiation energy and optoelectrical performance of ITO/ZnO film is improved with electron irradiation.
Keywords
ITO; ZnO; RF magentron sputtering; Electron irradiation; Figure of Merit;
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Times Cited By KSCI : 4  (Citation Analysis)
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