Effect of Electron Irradiation Energy on the Properties of In2O3 Thin Films
![]() |
Heo, Sung-Bo
(School of Materials Science and Engineering, University of Ulsan)
Chun, Joo-Yong (School of Materials Science and Engineering, University of Ulsan) Lee, Young-Jin (School of Materials Science and Engineering, University of Ulsan) Lee, Hak-Min (School of Materials Science and Engineering, University of Ulsan) Kim, Daeil (School of Materials Science and Engineering, University of Ulsan) |
1 | S. B. Heo, H. M. Lee, C. W. Jung, S. K. Kim, Y. J. Lee, Y. S. Kim, Y. Z. You and D. Kim : J. Kor. Soc. Heat treat, 24 (2011) 31. |
2 | Z. You and J. Dong : Microelectrode J, 38 (2007) 108. DOI ScienceOn |
3 | U. Betz, M. Olsson, J. Martly and M. Escola : Surf. Coat. Technol, 200 (2006) 5751. DOI |
4 | K. Maki, N. Komiya and A. Suzuki : Thin Solid Films, 445 (2003) 224. DOI |
5 | A. Nakaruk, D. Ragazzon and C.C. Sorrell : J. Analytical and Applied Pyrolysis 88 (2010) 98. DOI |
6 | J. H. Kwak and S. H. Cho : J. Korean Vacuum Soc, 19 (2010) 224. DOI |
7 | F. O. Adurodija, L. Semple and R. Bruning : Thin Solid Films, 492 (2005) 153. DOI |
8 | V. Korobov, M. Leibovitch and Y. Shapira : Appl. Phys. Lett, 65 (1994) 2290. DOI |
9 | V. Senthilkumar and P. Vickraman : Curr. Appl. Phys, 10 (2010) 880. DOI |
10 | H. Morikawa and M. Fujita : Thin Solid Films, 359 (2000) 61. DOI ScienceOn |
11 | D. Kim : J. Kor. Soc. Heat treat, 24 (2011) 199. |
12 | K. Shimakawa and T. Itoh : Jpn. J. Appl. Phys, 46 (2007) 24. DOI |
13 | S. B. Heo, Y. J. Lee, H. M. Lee, S. K. Kim, Y. S. Kim, Y. M. Kong and D. Kim, J. Kor. Soc. Heat treat, 24 (2011) 338. |
14 | G. Haacke : J. Appl. Phys, 47 (1976) 4086. DOI ScienceOn |
15 | D. Kim : Appl. Surf. Sci, 257 (2010) 704. DOI |
![]() |