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http://dx.doi.org/10.12656/jksht.2011.24.3.127

A Study of a Changing of Physical and Chemical Intra-structure on Si-DLC Film during Tribological Test  

Kim, Sang-Gweon (Surface Technology and Heat Treatment R&D Department, Korea Institute of Industrial Technology (KITECH))
Lee, Jae-Hoon (Surface Technology and Heat Treatment R&D Department, Korea Institute of Industrial Technology (KITECH))
Kim, Sung-Wan (Surface Technology and Heat Treatment R&D Department, Korea Institute of Industrial Technology (KITECH))
Publication Information
Journal of the Korean Society for Heat Treatment / v.24, no.3, 2011 , pp. 127-132 More about this Journal
Abstract
The silicon-containing Diamond-like Carbon (Si-DLC) film as an low friction coefficient coating has especially treated a different silicon content by plasma-enhanced chemical vapor deposition (PECVD) process at $500^{\circ}C$ on nitrided-STD 11 mold steel with (TMS) gas flow rate. The effects of variable silicon content on the Si-DLC films were tested with relative humidity of 5, 30 and 85% using a ball-on-disk tribometer. The wear-tested and original surface of Si-DLC films were analysed for an understanding of physical and chemical characterization, including a changing structure, via Raman spectra and nano hardness test. The results of Raman spectra have inferred a changing intra-structure from dangling bonds. And high silicon containing DLC films have shown increasing carbon peak ratio ($I_D/I_G$) values and G-peak values. In particular, the tribological tested surface of Si-DLC was shown the increasing hardness value in proportional to TMS gas flow rate. Therefore, at same time, the structure of the Si-DLC film was changed to a different intra-structure and increased hardness film with mechanical shear force and chemical reaction.
Keywords
Si-DLC; high temperature synthesis DLC; tribo-chemical reaction; hardness increasing on tribometer;
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Times Cited By KSCI : 1  (Citation Analysis)
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