A Study on the Properties of TiN Films by Using Electron Beam Irradiation
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Shin, C.H.
(School of Materials Science and Engineering, University of Ulsan)
Sung, Y.J. (DH Co., Ltd) Lim, S.Y. (DH Co., Ltd) Shin, G.W. (DH Co., Ltd) Jeong, C.W. (School of Materials Science and Engineering, University of Ulsan) Kim,, S.K. (School of Materials Science and Engineering, University of Ulsan) Kim, J.H. (School of Materials Science and Engineering, University of Ulsan) You, Y.Z. (School of Materials Science and Engineering, University of Ulsan) Kim, Dae-Il (School of Materials Science and Engineering, University of Ulsan) |
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