A Study on the Mechanical Properties of CNx Thin Films Deposited by Asymmetric Bipolar Pulsed D.C. Sputtering |
Kim, J.H.
(School of Material Science and Engineering, University of Ulsan)
Kim, D.W. (School of Material Science and Engineering, University of Ulsan) Cha, B.C. (School of Material Science and Engineering, University of Ulsan) Kim, S.K. (School of Material Science and Engineering, University of Ulsan) Lee, B.S. (School of Material Science and Engineering, University of Ulsan) Jeon, S.H. (R&D Center, ONE JUNG CAN MANUFACTURING CO,.Ltd) Kim, D.I. (School of Material Science and Engineering, University of Ulsan) You, Y.Z. (School of Material Science and Engineering, University of Ulsan) |
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