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Effects of Annealing Treatments on Microstructure and Mechanical Property of co-sputtered TiNi Thin Film  

Park, S.D. (Department of Advanced Materials Engineering, Chungbuk National University)
Baeg, C.H. (Department of Advanced Materials Engineering, Chungbuk National University)
Hong, J.W. (Department of Advanced Materials Engineering, Chungbuk National University)
Publication Information
Journal of the Korean Society for Heat Treatment / v.21, no.1, 2008 , pp. 26-32 More about this Journal
Abstract
Effects of annealing treatment on microstructure and mechanical property of co-sputtered TiNi thin films were studied. As-deposited films showed amorphous state. However, above annealing temperature of $500^{\circ}C$ martensite phase (B19'), precipitate phase ($Ti_2Ni$) and a small amount of parent phase ($B_2$) were present, and phase transformation behaviors were three multi-step phase transformations $B19^{\prime}{\rightarrow}B_2$ and $B_2{\rightarrow}R-phase$ and $R-phase{\rightarrow}B19^{\prime}$. Increase of martensite transformation temperature, increase of microhardness and Young's modulus of TiNi films annealed above $500^{\circ}C$ were discussed in terms of precipitate phase.
Keywords
TiNi Thin Film; Crystallization; Martensite Transformation Temperature; Nano-indentation;
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