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Characterization of TiAlN Coated Layer with Heat Treatment Prepared by R.F Magnetron Sputtering  

Song, Dong Hwan (Department of Advanced Materials Engineering, Chosun University)
Yang, Gwon Seung (Department of Advanced Materials Engineering, Chosun University)
Lee, Jong Kook (Department of Advanced Materials Engineering, Chosun University)
Publication Information
Journal of the Korean Society for Heat Treatment / v.19, no.4, 2006 , pp. 225-229 More about this Journal
Abstract
TiAlN coatings are available in various industry fields as a wear resistant coating for high-speed machining, due to its high hardness, excellent oxidation and corrosion resistance. The corrosion resistance of TiAlN multilayer coatings is better than that of single TiN coatings. Most of TiAlN coated layers were formed by heat treatment of coating layers with a non-stoichiometric $Ti_xAl_{1-x}N$. In this study, TiAlN coated layer was prepared by R.F magnetron sputtering and investigated the thermal behavior for heat treatment at various temperature in tube furnace. The formation of large particles with porous microstructure and phase change from HCP to FCC were observed on coated layer during heat treatment over $850^{\circ}C$ and it reduced the corrosion resistance of coated TiAlN layers.
Keywords
TiAlN; Magnetron sputtering; Coating; Thermal properties;
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1 H. A. jehn, F. Thiergarten, H. Ebersbacb, and D. Fabian: Surf. Coat. Technol., 50 (1994) 45   DOI   ScienceOn
2 A. A. Voevodin, C. Rebholz, J. M. Schneider, P. Stevenson, and A. Matthews: Surf. Coat. Technol., 73 (1995) 185   DOI   ScienceOn
3 C. H. Baeg, Y. G. Park, and M. Y. Wey: J. Kor. Inst. Met. & Mater., 40(9) (2002) 984
4 O. Knotek, W. D. Mtmz, and T. Leyendecker: J. Vac. Sci. Technol., A5 (1987) 2173
5 H. G. Prengel, A. T. Santhanam, R. M. Penich, P. C . Jindal, and K. H. Wendt: Surf. Coat. Technol., 94-95 (1997) 597   DOI   ScienceOn
6 L. A. Donahue, J. Cawley, and J. S. Brooks: Surf. Coat. Technol., 72 (1995) 128   DOI   ScienceOn
7 A. Raveh, M. Weiss, M. Pinkas, D. Z. Rosen, and G. Kimmel: Surf. Coat. Technol., 114 (1999) 269   DOI   ScienceOn
8 K. Tonshoff, A. Mohlfeld, T. Leyendecker, H. G. Fub, G. Eekens, R. Wenke, T. Cselle, and M . Schwenck: Surf. Coat. Techno., 94-95 (1997) 603   DOI   ScienceOn