1 |
J. M. Bustillo, R. T. Howe, and R. S. Muller, "Surface micromachining for micro electromechanical systems", Proceedings of the IEEE, vol. 86, pp. 1552-1574, Aug. 1998.
DOI
ScienceOn
|
2 |
Johnson, R. Collin. "There's more to MEMS than meets the iPhone", EE Times, 2007.
|
3 |
http://www.azonano.com/news.asp?newsID=4479 (AtoZ of Nanotechnology Homepage), "Worldwide MEMS Systems Market Forecasted to Reach $72 Billion by 2011".
|
4 |
Yamaha Datasheet, "YAS529 Magnetic field Sensor", Yamaha Co., 2007.
|
5 |
http://dev.naver.com/projects/motionemu (개발 결과물 홈페이지)
|
6 |
http://code.google.com/p/openintents/wiki/SensorSimulator (안드로이드 센서 시뮬레이터 홈페이지)
|
7 |
Kionix Datasheet, "KXSD9-2050 Tri-axis Digital Accelerometer Specification", Kionix Co., 2009.
|
8 |
Epson Toyocom Datasheet, "XV-8100CB Ultra Miniature Size Gyro Sensor", Epson Toyomo Co., 2007.
|
9 |
A. Antoniou, Digital Filters: Analysis, Design, and Applications, New York, NY: McGraw-Hill, 1993.
|
10 |
http://www.phidgets.com/products.php?category=5&product_id=1056 (Phidgets 홈페이지), 'PhidetSpatial 3/3/3'.
|
11 |
http://www.motionnode.com/ (MotionNode 홈페이지), 'MotionNode 3 DOF Inertial Measurement Unit'.
|
12 |
http://www.cruizcore.com/e_p_robot03.html (Microinfinity 홈페이지), 'CruizCore XG1010'.
|