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http://dx.doi.org/10.9717/kmms.2013.16.6.782

Wafer Position Recognition Based on Generalized Symmetry Transform  

Jun, Mi-Jin (계명대학교 게임모바일콘텐츠학과)
Lee, Joon-Jae (계명대학교 게임모바일콘텐츠학과)
Publication Information
Journal of Korea Multimedia Society / v.16, no.6, 2013 , pp. 782-794 More about this Journal
Abstract
This paper proposes the wafer position recognition algorithm using camera. First, for eliminating the image distortions caused by the illumination and the irregular camera position, the wafer image is restored as a circle through projective transformation. Next, we use edge detection algorithm to extract the wafer's edge and then apply Generalized Symmetry Transform(GST) to extract a circle. The GST evaluates symmetry between two points by combining a distance weight function, a phase weight function, and a logarithmic mapping of the points' intensities and detecting interest regions. Trough several experiments, we found out the proposed method is able to prevent the cleaning system and the wafer from damaging.
Keywords
Wafer Recognition; GST; Circle Detection;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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