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http://dx.doi.org/10.6117/kmeps.2019.26.1.0035

Observation of Diverse Aluminum Oxide Structures in a Phosphoric Acid Solution according to the Applied Anodization Voltage  

Jeong, Chanyoung (Department of Advanced Materials Engineering, Dong-Eui University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.26, no.1, 2019 , pp. 35-39 More about this Journal
Abstract
To date, porous alumina structures have been implemented by electrochemical anodization technique. The anodizing methods can easy to make a porous aluminum oxide film with a regular arrangement, but oxide film with complex structure type such as pillar-on-pore is relatively difficult to implement. Therefore, this study aims to observe the change of anodized oxide pore size, thickness, and structure in a phosphoric acid solution according to applied anodization voltage conditions. For the implementation of hybrid composite oxide structures, it is possible to create by modulating anodization voltage. The experimental conditions were performed at the applied anodization voltage of 100 V and 120 V in 10% phosphoric acid solution, respectively. The experimental results were able to observe the structure of oxides in the form of porous and composite structures (pillar-on-pore), depending on each condition.
Keywords
Thin film growth; Anodizing; Aluminum surface parameter; Phosphoric acid; Hybrid anodic oxide structures;
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Times Cited By KSCI : 4  (Citation Analysis)
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