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http://dx.doi.org/10.6117/kmeps.2018.25.2.035

Research on Fabrication of Silicon Lens for Optical Communication by Photolithography Process  

Park, Junseong (Optoelectronics Convergence Research Center, Chonnam National University)
Lee, Daejang (Optoelectronics Convergence Research Center, Chonnam National University)
Rho, Hokyun (Optoelectronics Convergence Research Center, Chonnam National University)
Kim, Sunggeun (Optoelectronics Convergence Research Center, Chonnam National University)
Heo, Jaeyeong (Optoelectronics Convergence Research Center, Chonnam National University)
Ryu, Sangwan (Optoelectronics Convergence Research Center, Chonnam National University)
Kang, Sung-Ju (School of Chemical Engineering, Chonnam National University)
Ha, Jun-Seok (Optoelectronics Convergence Research Center, Chonnam National University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.25, no.2, 2018 , pp. 35-39 More about this Journal
Abstract
In order to improve the coupling efficiency, a collimator lens that collects the light emitted from the laser diode at a wide angle to the core of the optical fiber is essential. Glass mold method using a mold is widely used as a collimator lens currently used. Although this method is inexpensive to produce, it is difficult to form precisely and quality problems such as spherical aberration. In this study, the precision of surface processing was improved by replacing the existing glass mold method with the semiconductor process, and the material of the lens was changed to silicon suitable for the semiconductor process. The semiconductor process consists of a photolithography process using PR and a dry etching process using plasma. The optical coupling efficiency was measured using an ultra-precision alignment system for the evaluation of the optical characteristics of the silicon lens. As a result, the optical coupling efficiency was 50% when the lens diameter was $220{\mu}m$, and the optical coupling property was 5% or less with respect to the maximum optical coupling efficiency in the lens diameter range of $210-240{\mu}m$.
Keywords
Silicon Lens; Aspherical Lens; Optical Coupling Efficiency; Reflow; Photolithography; Dry Etching;
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Times Cited By KSCI : 1  (Citation Analysis)
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