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http://dx.doi.org/10.6117/kmeps.2018.25.1.035

Carbon strain sensor using Nd: YAG laser Direct Writing  

Joo, Donghyun (Convergence Institute of Biomedical Engineering and Biomaterial, Seoul National University of Science and Technology)
Yoon, Sangwoo (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology)
Kim, Joohan (Department of Mechanical and Automotive Engineering, Seoul National University of Science and Technology)
Park, Woo-Tae (Convergence Institute of Biomedical Engineering and Biomaterial, Seoul National University of Science and Technology)
Publication Information
Journal of the Microelectronics and Packaging Society / v.25, no.1, 2018 , pp. 35-40 More about this Journal
Abstract
Nd:YAG laser was used to carbonize polyimide films to produce carbon films. This is a simple manufacturing process to fabricate low cost sensors. By applying this method, we studied characteristics of flexible and low-cost piezoresistive. Previously, many studies focused on carbonization of polyimide using $CO_2$ laser with wavelength of $10.6{\mu}m$. In this paper, carbonization (carbonization process) was performed on polyimide films using an Nd:YAG laser with a wavelength of $1.064{\mu}m$. In order to increase the resolution, we optimized the laser conditions of the power density ($W/cm^2$) and the beam scan rate. In previous studies using $CO_2$ laser, the minimum line width was $140{\sim}220{\mu}m$ but in this study, carbon line width was reduced to $35{\sim}40{\mu}m$. The initial sheet resistance of the carbon sensor was $100{\sim}300{\Omega}/{\square}$. The resistance decreased by 30% under stretched with a curvature radius of 21 R. The calculated gauge factor was 56.6. This work offers a simple, highly flexible, and low-cost process to fabricate piezoresistive sensors.
Keywords
Carbonization; Carbon; Laser; Polyimide; Piezoresistive; Strain Sensor;
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