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http://dx.doi.org/10.6117/kmeps.2015.22.1.063

A Study on Optical Characteristic of Nano Metal Grid Polarizer Film with Different Deposition Thicknes  

Kim, Jiwon (Department of Cogno-Mechatronics Engineering, Pusan National University)
Cho, Sanguk (Department of Cogno-Mechatronics Engineering, Pusan National University)
Jeong, Myung Yung (Department of Cogno-Mechatronics Engineering, Pusan National University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.22, no.1, 2015 , pp. 63-67 More about this Journal
Abstract
In this study, we demonstrate the change of optical characteristic by thickness of metal deposition on nano metal grid polarizer film fabrication. Nano metal grid polarizer film consists of aluminium grid polarizer layer on PET (Polyethylene phthalate) substrate. We aim at metal grid layer formation for the large nano wire grid polarizer fabrication. we draw process conditions of the nano metal grid polarizer film fabrication to improve transmittance and extinction ratio and Nano wire grid polarizer film (NWGP) film is fabricated with 140 nm pitch, 70 nm width, and 70 nm depth of metal grid on optimum design conditions. As a result, we get high optical properties of nano wire grid polarizer which is the maximum transmittance of 80% and the extinction ratio of $10^6$ at 600 nm wavelength respectively.
Keywords
Nano wire grid polarizer; E-beam evaporation; Nano patterning; Roll to roll nano imprint lithography;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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