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Thermoelectric Properties of Bi-Te Thin Films Processed by Coevaporation  

Choi, Young-Nam (Department of Materials Science and Engineering, Hongik University)
Kim, Min-Young (Department of Materials Science and Engineering, Hongik University)
Oh, Tae-Sung (Department of Materials Science and Engineering, Hongik University)
Publication Information
Journal of the Microelectronics and Packaging Society / v.17, no.4, 2010 , pp. 89-94 More about this Journal
Abstract
Bi-Te films were processed by coevaporation of Bi and Te dual sources with variations of the mole ratio of the Bi and Te evaporation sources, and thermoelectric properties of the coevaporated Bi-Te films were characterized. The coevaporated Bi-Te films were n-type semiconductors and exhibited Seebeck coefficients of $-60{\sim}-80{\mu}V/K$. The Terich Bi-Te film, processed with Bi and Te dual sources of 30 mol% Bi : 70 mol% Te ratio, exhibited a power factor of $5{\times}10^{-4}W/m-K^2$. On the other hand, a power factor of $17.7{\times}10^{-4}W/m-K^2$ was obtained for the Bi-rich film coevaporated using Bi and Te dual sources of 90 mol% Bi : 10 mol% Te ratio.
Keywords
thermoelectrics; thin films; $Bi_2Te_3$; coevaporation; power factor;
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Times Cited By KSCI : 4  (Citation Analysis)
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