Study of Tungsten Nitride Diffusion Barrier for Various Nitrogen Gas Flow Rate by Employing Nano-Mechanical Analysis |
Kwon, Ku Eun
(Department of Nano & Electronic Physics, Kookmin University)
Kim, Sung Joon (Department of Nano & Electronic Physics, Kookmin University) Kim, Soo In (Department of Nano & Electronic Physics, Kookmin University) Lee, Chang Woo (Department of Nano & Electronic Physics, Kookmin University) |
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