Nano-mechanical Properties of Nanocrystal of HfO2 Thin Films for Various Oxygen Gas Flows and Annealing Temperatures |
Kim, Joo-Young
(Department of Nano & Electronic Physics, Kookmin University)
Kim, Soo-In (Department of Nano & Electronic Physics, Kookmin University) Lee, Kyu-Young (Department of Nano & Electronic Physics, Kookmin University) Kwon, Ku-Eun (Department of Nano & Electronic Physics, Kookmin University) Kim, Min-Suk (Seoul Science High School) Eum, Seoung-Hyun (Seoul Science High School) Jung, Hyun-Jean (Seoul Science High School) Jo, Yong-Seok (Seoul Science High School) Park, Seung-Ho (Seoul Science High School) Lee, Chang-Woo (Department of Nano & Electronic Physics, Kookmin University) |
1 | J. Robertson, J. Appl. Phys. 104, 124111 (2008). DOI ScienceOn |
2 | J. H. Choi, Y. Mao, and J. P. Chang, Materials Science and Engineering R72, 97 (2011). |
3 | S. I. Kim and C. W. Lee, J. Nanosci. & Nanotechnol. 11, 1401 (2011). DOI |
4 | S. I. Kim, H. W. Oh, J. W. Huh, B. K. Ju, and C. W. Lee, Thin Solid Films 519, 6872 (2011). DOI |
5 | J. Y. Kim, S. I. Kim, K. Y. Lee, and C. W. Lee, J. Korean vacuum Soc. 21, 12 (2012). DOI ScienceOn |
6 | S. I. Kim, K. Y. Lee, J. Y. Kim, and C. W. Lee, J. Korean vacuum Soc. 20, 456 (2011). DOI |
7 | J. Y. Kim, H. W. Oh, S. I. Kim, S. H. Choi, and C. W. Lee, J. Korean vacuum Soc. 20, 200 (2011). DOI |
8 | H. Grüger, C. Kunath, E. Kurth, S. Sorge, W. Pufe, and T. Pechstein, Thin Solid Films 447, 509 (2004). DOI |
9 | C. V. Ramana, K. Kamala Bharathi, A. Garcia, and A. L. Campbell, J. Phys. Chem. C. 116, 9955 (2012). DOI |
10 | S. V. Ushakov, A. Navrotsky, Y. Yang, S. Stemmer, K. Kukli, M. Ritala, M. A. Leskel, P. Fejes, A. Demkov, C. Wang, B. -Y. Nguyen, D. Triyoso, and P. Tobin, Phys. Stat. Sol. (b), 241, 2268 (2004). DOI |