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http://dx.doi.org/10.5757/JKVS.2012.21.2.86

The Effect of Speed of Deposited Atom on Growth Morphology  

Seo, J. (Department of Ophthalmic Optics, Chodnag University)
Shim, H.S. (Department of Ophthalmic Optics, Gwangju Health College)
Kim, S.H. (Department of Ophthalmic Optics, Gwangju Health College)
Publication Information
Journal of the Korean Vacuum Society / v.21, no.2, 2012 , pp. 86-92 More about this Journal
Abstract
We have studied the effect of speed of deposited atom on morphology evolution during Glancing Angle Deposition (GLAD). Using Kinetic Monte Carlo simulation that incorporate molecular dynamics simulations, we have shown that the rough surface morphology became smoother as the speed of deposited atom is increased. The growth exponent ${\beta}$ change from 0.97 to 0.67 as the speed increase from ${\upsilon}_0$ to $10{\upsilon}_0$ in the case of GLAD. We also examined the effect of speed of deposited atom for the case of chemical vapor deposition (CVD) simulation. Compared to GLAD, the variation in scaling exponent ${\beta}$ is small but the speed of deposited atom also have considerable effect on growth morpholgy in the case of CVD.
Keywords
Scaling exponent; Glancing angle deposition; Kinetic monte carlo simulation;
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