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http://dx.doi.org/10.5757/JKVS.2012.21.1.1

Development of Inner Pressure Measurement System for Hermetic Sealed Small Components  

Hong, S.S. (Korea Research Institute of Standards and Science)
Lim, I.T. (Korea Research Institute of Standards and Science)
Lim, J.Y. (Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.21, no.1, 2012 , pp. 1-5 More about this Journal
Abstract
The measurement device of internal pressures of small components sealed hermetically was developed. The internal pressure of a sample measured with this device was 43.151 kPa, and the expanded uncertainty ($\kappa$=2) was 741 Pa. The resultant measurement ability of internal pressures in small vacuum components, which had been almost impossible previously, shows the possibility of internal vacuum detection of hermetically sealed parts.
Keywords
Vacuum; Hermetic seal; Sample; Pressure; Uncertainty;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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