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http://dx.doi.org/10.5757/JKVS.2010.19.4.300

Fabrication of Superhydrophobic Micro-Nano Hybrid Structures by Reactive Ion Etching with Au Nanoparticle Masks  

Lee, C.Y. (Korea Research Institute of Standards and Science (KRISS))
Yoon, S.B. (Korea Research Institute of Standards and Science (KRISS))
Jang, G.E. (Department of Advanced Materials Engineering, Chungbuk National University)
Yun, W.S. (Korea Research Institute of Standards and Science (KRISS))
Publication Information
Journal of the Korean Vacuum Society / v.19, no.4, 2010 , pp. 300-306 More about this Journal
Abstract
Superhydrophobic micro-nano hybrid structures were fabricated by reactive ion etching of hydrophobic polymer micro patterns using gold nanoparticles as etch masks. Micro structures of perfluoropolyether bisurethane methacrylate (PFPE) were prepared by soft-lithographic technique using polydimethylsiloxane (PDMS) molds. Water contact angles on the surfaces of various PFPE micro structures and corresponding micro-nano hybrid structures were compared to examine the effects of micro patterning and nanostructure formation in the manifestation of superhydrophobicity. The PFPE micro-nano hybrid structures exhibited a very stable superhydrophobicity, while the micro-only structures could not reach the superhydrophobicity but only showed the unstable hydrophobicity.
Keywords
Superhydrophobicity; Micro-nano hybrid structure; Gold nanoparticle mask; PFPE; Contact angle;
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