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http://dx.doi.org/10.5757/JKVS.2010.19.4.281

Effects of Thickness on Structural and Optical Properties of ZnO Thin Films Fabricated by Spin Coating Method  

Yim, Kwang-Gug (Department of Nano Systems Engineering, Inje University)
Kim, Min-Su (Department of Nano Systems Engineering, Inje University)
Kim, Ghun-Sik (Department of Nano Systems Engineering, Inje University)
Choi, Hyun-Young (Department of Nano Systems Engineering, Inje University)
Jeon, Su-Min (Department of Nano Systems Engineering, Inje University)
Cho, Min-Young (Department of Nano Systems Engineering, Inje University)
Kim, Hyeoung-Geun (Department of Nano Systems Engineering, Inje University)
Lee, Dong-Yul (Samsung LED)
Kim, Jin-Soo (Division of Advanced Materials Engineering, Chonbuk National University)
Kim, Jong-Su (Department of Physics, Yeungnam University)
Lee, Joo-In (Advanced Instrument Technology Center, Korea Research Institute of Standards and Science)
Leem, Jae-Young (Department of Nano Systems Engineering, Inje University)
Publication Information
Journal of the Korean Vacuum Society / v.19, no.4, 2010 , pp. 281-286 More about this Journal
Abstract
Thickness effects on the structural and optical properties of ZnO thin films fabricated by spin coating method have been carried out. With increase in the thickness of the ZnO thin films, the width and density of striation shape are increased. The ZnO thin film with thickness of 450 nm has a smooth surface morphology. For the ZnO thin film with a smooth surface, orientation factor ${\alpha}_{(002)}$ is sharply increased and FWHM of (002) diffraction peak is decreased compared to the ZnO thin films with a striation shape surface. Thickness and surface morphology of the ZnO thin films hardly affect the NBE peak position. However, the DLE peak position is blue-shifted as the surface morphology is changed from striation to smooth surface. The PL intensity ratio of the NBE to DLE is increased and the FWHM of NBE peak is decreased as the thickness of the ZnO thin films is increased.
Keywords
ZnO; Spin coating method; SEM; XRD; Photoluminescence;
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