Consideration on the Thickness of the Gas Introducing Tube of the Test Dome Specified in the ISO Standard |
In, S.R. (Fusion Engineering Technology Development Dept., KAERI) |
1 | M. H. Hablanian, J. Vac. Sci. Technol. A5, 2552 (1987) or AVS 4.1. |
2 | B. R. F. Kendall, J. Vac. Sci. Technol. A7, 2043 (1989) or AVS 5.2. |
3 | 인상렬, 진공학회지 4, 1 (1995). |
4 | Vacuum Technology-Standard Methods for Measuring Vacuum-pump Performance-General Description, ISO 21360 (2007) |
5 | Vacuum Pumps Acceptance Specifications Part II (DP), PNEUROP 5607 (1972) |
6 | Vacuum Pumps Acceptance Specifications Part III (TMP), PNEUROP 5608 (1973) |
7 | 터보分子펌프性能試驗方法, JVIS 005 (1991) |