Fabrication of Oxidative Thin Film with Process Conditions by Transformer Coupled Plasma Chemical Vapor Deposition |
Gim, T.J.
(Electrical Engineering, Inha University)
Choi, Y. (Atech System Co.) Shin, P.K. (Electrical Engineering, Inha University) Park, G.B. (Electrical Engineering, Yuhan College) Shin, H.Y. (Electronic Engineering, Namseoul University) Lee, B.J. (Electronic Engineering, Namseoul University) |
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