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http://dx.doi.org/10.5757/JKVS.2009.18.5.394

Structural and Optical Properties of ZnO/Glass Thin Films Grown by Radio-Frequency Magnetron Sputtering with a Powder Target  

Sun, J.H. (Department of Advanced Materials Engineering, Chosun University)
Kang, H.C. (Department of Advanced Materials Engineering, Chosun University)
Publication Information
Journal of the Korean Vacuum Society / v.18, no.5, 2009 , pp. 394-401 More about this Journal
Abstract
This paper reports the structural and optical properties of ZnO/glass thin films grown by radio-frequency magnetron sputtering with a powder target. In contrast to ZnO ceramic target typically used, a ZnO raw powder target was sputtered in this study. ZnO grew with the (0002) preferred orientation along the surface normal direction. Initially, the surface of ZnO thin films was flat considerably and then it became rougher as the thickness increased. The optical transmittance was as high as 88% in the range of 400-1000 nm. The bandgap energy of 3.23 eV at the 220 nm thick sample was estimated.
Keywords
ZnO; RF magnetron sputtering; Thin film; Transparent conducting oxide; Powder target;
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Times Cited By KSCI : 8  (Citation Analysis)
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