1 |
Characteristics and Physical Property of Tungsten(W) Related Diffusion Barrier Added Impurities
/ [Kim, Soo-In;Lee, Chang-Woo;] / Journal of the Korean Vacuum Society
|
2 |
Characteristics of Electomigration & Surface Hardness about Tungsten-Carbon-Nitrogen(W-C-N) Related Diffusion Barrier
/ [Kim, Soo-In;Hwang, Young-Joo;Ham, Dong-Shik;Nho, Jae-Kue;Lee, Jae-Yun;Park, Jun;Ahn, Chan-Goen;Kim, Chang-Seong;Oh, Chan-Woo;Yoo, Kyeng-Hwan;Lee, Chang-Woo;] / Journal of the Korean Vacuum Society
|
3 |
Surface Physical Properties of W-N Nano Thin Films by Nanotribological Analysis
/ [Kim, Soo-In;Lee, Kyu-Young;Kim, Joo-Young;Lee, Chang-Woo;] / Journal of the Korean Vacuum Society
|
4 |
Study of Tungsten Nitride Diffusion Barrier for Various Nitrogen Gas Flow Rate by Employing Nano-Mechanical Analysis
/ [Kwon, Ku Eun;Kim, Sung Joon;Kim, Soo In;Lee, Chang Woo;] / Journal of the Korean Vacuum Society
|
5 |
Physical Property of W-C-N Diffusion Barrier through Stress-Strain curve
/ [Lee, Kyu-Young;Kim, Soo-In;Park, Sang-Jae;Lee, Dong-Kwan;Jeong, Yong-Rok;Jung, Jun;Lee, Jong-Rim;Lee, Chang-Woo;] / Journal of the Korean Vacuum Society
|