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Overview on the Development of UHV Ion Pumps  

Bonmassar, Luca (Varian Vacuum Technologies)
Publication Information
Journal of the Korean Vacuum Society / v.15, no.3, 2006 , pp. 231-240 More about this Journal
Abstract
The paper reviews the development of ion pumps, their operating principles and describes particular designs. The performance of ion pumps when used for various gases, their range of operation and fields of application are discussed.
Keywords
Ion pump; Diode; Starcell; Vacuum;
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