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National Vacuum Standards from Low to Ultra-high Vacuum  

Hong S. S. (Korea Research Institute of Standards and Science)
Lim I. T. (Korea Research Institute of Standards and Science)
Shin Y. H. (Korea Research Institute of Standards and Science)
Chung K. H. (Korea Research Institute of Standards and Science)
Publication Information
Journal of the Korean Vacuum Society / v.15, no.1, 2006 , pp. 1-13 More about this Journal
Abstract
Vacuum laboratory in Korea Research Institute of Standards and Science (KRISS) was opened in 1983 for establishing and disseminating vacuum standard in Korea. The major three systems such as the ultrasonic interferometer manometer (UIM), the static expansion system (SES) and the dynamic expansion system (DES) with orifice and porous plug conductance are developed. In this study, the standard systems from low to ultra-high vacuum, uncertainty analysis by ISO regulation, and key and bilateral comparison results will be described.
Keywords
Ultrasonic interferometer manometer; Static expansion method; Dynamic calibration system; Vacuum standards; Uncertainty; International comparison;
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