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Epitaxial growth of oxide films using miscut substrates  

Bu Sang Don (전북대학교 물리학과)
Publication Information
Journal of the Korean Vacuum Society / v.13, no.4, 2004 , pp. 145-149 More about this Journal
Abstract
We have grown piezoelectric oxide films by RF magnetron sputtering using miscut substrates. Films were Brown on(001) $SrTiO_3$ substrates with miscut angles from 0 to 8 degrees toward the (100) direction. Films on high miscut substrates (>$4^{\circ}$) showed almost the pure perovskite phase in x-ray diffraction and were nearly stoichiometric. In contrast, films on exact (001) $SrTiO_3$ contained a high volume fraction of pyrochlore phases. A film on an $8^{\circ}$ miscut substrate exhibits a polarization hysteresis loop with a remnent polarization of 20$\mu$C/$\textrm{cm}^2$ at room temperature.
Keywords
Epitaxial growth; Miscut substrates; Piezoelectric oxide films;
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