[KSCI] Korea Science Citation Index Service

Monitoring of III-V semiconductor surface by In-situ Surface PhotoAbsorption

Kim, T. J. (Department of Physics and Research Institute of Basic Sciences, Kyung Hee University)
Kim, Y. D. (Department of Physics and Research Institute of Basic Sciences, Kyung Hee University)
H. Hwang (School of Materials Science and Engineering and ISRC, Seoul National University)
E. Yoon (School of Materials Science and Engineering and ISRC, Seoul National University)

Publication Information

Journal of the Korean Vacuum Society / v.12, no.S1, 2003 , pp. 79-82 More about this Journal

Abstract

We present the investigation on P- and As-desorption process from the (001) InP surface in metal organic chemical vapor deposition using surface photoabsorption (SPA). The monochromatic SPA signal showed rapid initial increase to reach In-stabilized surface value after $PH_3$ was turned off, but in case of As-desorption, the signal showed clear existence of a metastable state after the $AsH_3$ was turned off. The SPA spectra at each stable surfaces were taken to confirm the interpretation. This result indicates that the As-desorption process should be understood as a two-step process, in contrast to P-desorption of one-step process.

Keywords

surface photoabsorption; P-desorption; As-desorption;

Citations & Related Records

Reference

1	M. L. Begarney, C. H. Li, D. C. Law, S. B. Visbeck, Y. Sun, and R. F. Hicks, Appl. Phys. Lett. 78, 55 (2001) DOI ScienceOn
2	N. Kobayashi and Y. Kobayashi, Jpn. J. Appl. Phys. 30, L1699 (1991) DOI
3	D. E. Aspnes, J. P. Harbison, A. A. Studna, and L. T. Florez, Phys. Rev. Lett. 59, 1687 (1987) DOI ScienceOn
4	T.W. Lee, H. Hwang, Y. Moon, E. Yoon, and Y D. Kim, J. Vac. Sci. Technol. A 17, 2663 (1999)
5	N. Kobayashi and Y. Kobayashi, Thin Solid Films 225, 32 (1993) DOI ScienceOn
6	T, W. Lee, H. Hwang. Y. Moon, E. Yoon, and Y. D. Kim, J. Vac. Sci. Technol. A 17, 2663 (1999)
7	I. Kamiya, D. E. Aspnes, L. T. Florez, and J. P. Harbison, Phy. Rev. B 46, 15894 (1992)
8	N. Kobayashi and Y. Kobayashi, J. Cryst. Growth 124, 525 (1992) DOI ScienceOn
9	N. Kobayashi, J. Cryst. Growth 145, 1 (1994) DOI ScienceOn
10	Y. D. Kim, F. Nakamura, E. Yoon, and D. V. Forbes, and J. J. Coleman, Appl. Phys. Lett. 69, 4209 (1996) DOI ScienceOn
11	T. W. Lee, H. Hwang, Y. Moon, E. Yoon, and Y. D Kim, J. Kor. Phys. Soc. 34, S461 (1999)