The characteristics of silicon nitride thin films prepared by atomic layer deposition with batch type reactor |
Kim, Hyuk
(Department of Materials Engineering, Hanbat National University)
Lee, Ju-Hyun (Department of Materials Sciences and Engineering. KAIST) Han, Chang-Hee (Department of Materials Engineering, Hanbat National University) Kim, Woon-Joong (Department of Advanced Materials Engineering, Sejong University) Lee, Yeon-Seung (Division of Information Communication and Computer Engineering, Hanbat National University) Lee, Won-Jun (Department of Advanced Materials Engineering, Sejong University) Na, Sa-Kyun (Department of Materials Engineering, Hanbat National University) |