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Parametric model for the dielectric function of InGaAs alloy films  

인용섭 (경희대학교 물리학과)
김태중 (경희대학교 물리학과)
최재규 (경희대학교 물리학과)
김영동 (경희대학교 물리학과)
Publication Information
Journal of the Korean Vacuum Society / v.12, no.1, 2003 , pp. 20-24 More about this Journal
Abstract
We Performed the modeling of the dielectric functions of InGaAs by using the parametric semiconductor model. Parametric model describes the analytic dielectric function as the summation of several energy-bounded Gaussian-broadened polynomials and provides a reasonably well parameterized function which can accurately reproduce the optical constants of InGaAs materials. We obtained the values of fitting parameters of an arbitrary composition $\chi$ through the parametric model. And then, from these parameters we could obtain the unknown dielectric functions of InGaAs alloy films ($0\leq\chi\leq1$).
Keywords
dielectric function; ellipsometry;
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