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A study on friction and stress analysis of wedge mount leveler in Semi-Conductor Sub-Fab  

Min, Kyung-Ho (Incheon Campus of Korea Polytechnic II Dept. of Mechanical System)
Song, Ki-Hyeok (Department of Mechanical Engineering, Inha University)
Hong, Kwang-Pyo (Department of Mechanical Engineering, Inha University)
Publication Information
Design & Manufacturing / v.11, no.2, 2017 , pp. 25-28 More about this Journal
Abstract
Semiconductor equipment manufacturers desire to enhance efficiency of Sub Fab to increase semiconductor productivity. For this reason, Sub Fab equipment manufacturers are developing Integrated System that combined modules with multiple facilities. Integrated System is required to apply Mount Leveler of Wedge Type in compliance with weight increase compared with existing single equipment and product shape change. This thesis analyzes main design variables of components of Wedge Mount Leveler and carries out structure analysis using ANSYS, finite element analysis program Analysis shows that main design variables of components of Wedge Mount Leveler has self-locking condition by friction force of Wedge and adjusting bolt. Each friction force hinges upon Wedge angle and Friction Coefficient of contact surface and upon the thread angle and Friction Coefficient of contact surface. Also, as a result of carrying out structure analysis of Wedge Mount Leveler, deflection and stress appears in different depending on the height of the level.
Keywords
Friction; Semiconductor; Stress; Wedge Mount Leveler;
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