Establishment and Application of a Femtosecond-laser Two-photon-polymerization Additive-manufacturing System |
Li, Shanggeng
(Department of Plasma Physics and Fusion Engineering, University of Science and Technology of China)
Zhang, Shuai (Laser Fusion Research Center, China Academy of Engineering Physics) Xie, Mengmeng (School of Mechanical Engineering, Jiangnan University) Li, Jing (Laser Fusion Research Center, China Academy of Engineering Physics) Li, Ning (Laser Fusion Research Center, China Academy of Engineering Physics) Yin, Qiang (Laser Fusion Research Center, China Academy of Engineering Physics) He, Zhibing (Laser Fusion Research Center, China Academy of Engineering Physics) Zhang, Lin (Laser Fusion Research Center, China Academy of Engineering Physics) |
1 | S. Maruo and S. Kawata, "Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication," J. Microelectromech. Syst. 7, 411-415 (1999). DOI |
2 | X. Wang, Z. Wei, C. Z. Baysah, M. Zheng, and J. Xing, "Biomaterial-based microstructures fabricated by two-photon polymerization microfabrication technology," RSC Adv. 9, 34472-34480 (2019). DOI |
3 | M. Goppert-Mayer, "Uber elementarakte mit zwei quantensprungen," Ann. Phys. 9, 273-294 (1931). DOI |
4 | S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697-698 (2001). DOI |
5 | D. A. Parthenopoulos and P. M. Rentzepis, "Three-dimensional optical storage memory," Science 245, 843-845 (1989). DOI |
6 | R. Woods, S. Feldbacher, D. Zidar, G. Langer, V. Satzinger, G. Schmid, W. Leeb, and W. Kern, "Development and characterization of optoelectronic circuit boards produced by two-photon polymerization using a polysiloxane containing acrylate functional groups," Appl. Opt. 52, 388-393 (2013). DOI |
7 | X. P. Yuan, M. Zhao, X. Guo, M. Zhao, X. J. Guo, Y. Li, Y. Yu, Z. S. Gan, and H. Ruan, "Ultra-high capacity for three-dimensional optical data storage inside transparent fluorescent tape," Opt. Lett. 45, 1535-1538 (2020). DOI |
8 | T. Gissibl, S. Thiele, A. Herkommer, and H. Giessen, "Two-photon direct laser writing of ultracompact multi-lens objectives," Nat. Photonics 10, 554-560 (2016). DOI |
9 | J. Cai and W. Huang, "Two-photon three-dimensional optical storage of a new pyrimidine photobleaching material," Optik 126, 343-346 (2015). DOI |
10 | E. E. Morales-Delgado, L. Urio, D. B. Conkey, N. Stasio, D. Psaltis, and C. Moser, "Three-dimensional microfabrication through a multimode optical fiber," Opt. Express 25, 7031-7045 (2017). DOI |
11 | M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, "Direct laser writing of three-dimensional photonic-crystal templates for telecommunications," Nat. Mater. 3, 444-447 (2004). DOI |
12 | Z.-C. Ma, Y.-L. Zhang, B. Han, X.-Y. Hu, C.-H. Li, Q.-D. Chen, and H.-B. Sun, "Femtosecond laser programmed artificial musculoskeletal systems," Nat. Commun. 11, 4536 (2020). DOI |
13 | Y.-L. Zhang, Y. Tian, H. Wang, Z.-C Ma, D.-D. Han, L.-G. Niu, Q.-D. Chen, and H.-B. Sun, "Dual-3D femtosecond laser nanofabrication enables dynamic actuation," ACS Nano 13, 4041-4048 (2019). DOI |
14 | B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrlich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I.-Y. S. Lee, D. McCord-Maughon, J. Qin, H. Rockel, M. Rumi, X.-L. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51-54 (1999). DOI |
15 | S. Bichler, S. Feldbacher, R. Woods, V. Satzinger, V. Schmidt, G. Jakopic, G. Langer, and W. Kern, "Functional flexible organic-inorganic hybrid polymer for two photon patterning of optical waveguides," Opt. Mater. 34, 772-780 (2012). DOI |
16 | B. Xu, Y. Shi, Z. X. Lao, J. C. Ni, G. Q. Li, Y. L. Hu, J. W. Li, J. R. Chu, D. Wu, and K. Sugiokac, "Real-time two-photon lithography in controlled flow to create a single-microparticle array and particle-cluster array for optofluidic imaging," Lab Chip 18, 442-450 (2018). DOI |
17 | Y. Yang, Y. Zhang, Y. Hu, G. Li, C. Zhang, Y. Song, L. Li, C. Ni, N. Dai, Y. Cai, J. Li, D. Wu, and J. Chu, "Femtosecond laser regulated ultrafast growth of mushroom-like architecture for oil repellency and manipulation," Nano Lett. 21, 9301-9309 (2021). DOI |
18 | D. Wei, C. Wang, H. Wang, X. Hu, D. Wei, X. Fang, Y. Zhang, D. Wu, Y. Hu, J. Li, S. Zhu, and M. Xiao, "Experimental demonstration of a three-dimensional lithium niobate nonlinear photonic crystal," Nature Photonics 12, 596-600 (2018). DOI |
19 | Y. Hu, H. Yuan, S. Liu, J. Ni, Z. Lao, C. Xin, D. Pan, Y. Zhang, W. Zhu, J. Li, D. Wu, and J. Chu, "Chiral assemblies of laser-printed micropillars directed by asymmetrical capillary force," Adv. Mater. 32, 2002356 (2020). DOI |
20 | D. Wu, S.-Z. Wu, J. Xu, L.-G. Niu, K. Midorikawa, and K. Sugioka, "Hybrid femtosecond laser microfabrication to achieve true 3D glass/polymer composite biochips with multiscale features and high performance: the concept of ship-in-a-bottle biochip," Laser Photonics Rev. 8, 458-467 (2014). DOI |
21 | J. Li, P. Fejes, D. Lorenser, B. C. Quirk, P. B. Noble, R. W. Kirk, A. Orth, F. M. Wood, B. C. Gibson, D. D. Sampson, and R. A. McLaughlin, "Two-photon polymerisation 3D printed freeform micro-optics for optical coherence tomography fibre probes," Sci. Rep. 8, 14789 (2018). DOI |
22 | T. Weiss, R. Schade, T. Laube, A. Berg, G. Hildebrand, R Wyrwa, M. Schnabelrauch, and K. Liefeith, "Two-photon polymerization of biocompatible photopolymers for microstructured 3D biointerfaces," Adv. Eng. Mater. 13, 264-273 (2011). |
23 | J.-F. Xing, M.-L. Zheng, and X.-M. Duan, "Two-photon polymerization microfabrication of hydrogels: an advanced 3D printing technology for tissue engineering and drug delivery," Chem. Soc. Rev. 44, 5031-5039 (2015). DOI |
24 | Y.-H. Liu, Y.-Y. Zhao, F. Jin, X.-Z. Dong, M.-L. Zheng, Z.-S. Zhao, and X.-M. Duan, "λ/12 Super resolution achieved in maskless optical projection nanolithography for efficient cross-scale patterning," Nano Lett. 21, 3915-3921 (2021). DOI |
25 | X. L. Ren, M. L. Zheng, F. J., Y. Y. Zhao, X. Z. Dong, J. Liu, H. Yu, X. M. Duan, Z. S. Zhao, "Laser direct writing of silver nanowire with amino acids-assisted multiphoton photoreduction," J. Phys. Chem. C 120, 26532-26538 (2016). DOI |
26 | K. Moussi, A. Bukhamsin, T. Hidalgo, and J. Kosel, "Biocompatible 3D printed microneedles for transdermal, intradermal, and percutaneous applications," Adv. Eng. Mater. 22, 1901358 (2020). DOI |
27 | E. Balciunas, S. J. Baldock, N. Dreize, M. Grubliauskaite, S. Coultas, D. L. Rochester, M. Valius, J.G. Hardy, and D. Baltriukiene, "3D printing hybrid organometallic polymer-based biomaterials via laser two-photon polymerization," Polym. Int. 68, 1928-1940 (2019). DOI |
28 | G. D. Giustina, A. Gandin, L. Brigo, T. Panciera, S. Giulitti, P. Sgarbossa, D. D'Alessandro, L. Trombi, S. Danti, and G. Brusatin, "Polysaccharide hydrogels for multiscale 3D printing of pullulan scaffolds," Mater. Des. 165, 107566 (2019). DOI |
29 | C. Zheng, F. Jin, Y. Zhao, M. Zheng, J. Liu, X. Dong, Z. Xiong, Y. Xia, and X. Duan, "Light-driven micron-scale 3D hydrogel actuator produced by two-photon polymerization microfabrication," Sens. Actuators B: Chem 304, 127345 (2020). DOI |
30 | H. Sun, V. Mizeikis, Y. Xu, S. Juodkazis, J. Ye, S. Matsuo, and H. Misawa, "Microcavities in polymeric photonic crystals," Appl. Phys. Lett. 79, 1-3 (2001). DOI |
31 | J. Zhu, Q. Zhang, T. Yang, Y. Liu, and R. Liu, "3D printing of multi-scalable structures via high penetration near-infrared photopolymerization," Nat. Commun. 11, 3462 (2020). DOI |
32 | X. Liu, H. Gu, M. Wang, X. Du, B. Gao, A. Elbaz, L. Sun, J. Liao, P. Xiao, and Z. Gu, "Liquid superrepellents: 3D printing of bioinspired liquid superrepellent structures," Adv. Mater. 30, 1870157 (2018). DOI |
33 | H. Ding, Q. Zhang, H. Gu, X. Liu, L. Sun, M. Gu, and Z. Gu, "Controlled microstructural architectures based on smart fabrication strategies," Adv. Func. Mater. 30, 1901760 (2020). DOI |
34 | X. Liu, H. Gu, H. Ding, X. Du, M. Wei, Q. Chen, and Z. Gu, "3D bioinspired microstructures for switchable repellency in both air and liquid," Adv. Sci. 7, 2000878 (2020). DOI |
35 | I. A. Paun, C. C. Mustaciosu, M. Mihailescu, B. S. Calin, and A. M. Sandu, "Magnetically-driven 2D cells organization on superparamagnetic micromagnets fabricated by laser direct writing," Sci. Rep. 10, 16418 (2020). DOI |
36 | M. Kaynak, P. Dirix, and M. S. Sakar, "Addressable acoustic actuation of 3D printed soft robotic microsystems," Adv. Sci. 7, 2001120 (2020). DOI |
37 | C. C. Alcantara, F. C. Landers, S. Kim, C. De Marco, D. Ahmed, B. J. Nelson, and S. Pane, "Mechanically interlocked 3D multi-material micromachines," Nat. Commun. 11, 5957 (2020). DOI |
38 | Z. Gan, Y. G, R. A. Evans, and M. Gu, "Three-dimensional deep sub-diffraction optical beam lithography with 9 nm feature size," Nat. Commun. 4, 2061 (2013). DOI |
39 | S. Zhang, S. Li, X. Wan, J. Ma, N. Li, J. Li, and Q. Yin, "Ultrafast, high-resolution and large-size three-dimensional structure manufacturing through high-efficiency two-photon polymerization initiators," Addit. Manuf. 47, 102358 (2021). |