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http://dx.doi.org/10.3807/COPP.2022.6.4.359

Angle-sensitive Pixels Based on Subwavelength Compound Gratings  

Meng, Yunlong (School of Electronic Science and Engineering, Nanjing University)
Hu, Xuemei (School of Electronic Science and Engineering, Nanjing University)
Yang, Cheng (School of Electronic Science and Engineering, Nanjing University)
Shen, Xinyu (School of Electronic Science and Engineering, Nanjing University)
Cao, Xueyun (School of Electronic Science and Engineering, Nanjing University)
Lin, Lankun (School of Electronic Science and Engineering, Nanjing University)
Yan, Feng (School of Electronic Science and Engineering, Nanjing University)
Yue, Tao (School of Electronic Science and Engineering, Nanjing University)
Publication Information
Current Optics and Photonics / v.6, no.4, 2022 , pp. 359-366 More about this Journal
Abstract
In this paper, we present a new design for angle-sensitive pixels (ASPs). The proposed ASPs take advantage of subwavelength compound gratings to capture the light angle, which enables pixel size to reach the wavelength scale of 0.7 ㎛ × 0.7 ㎛. The subwavelength compound gratings are implemented by the wires of the readout circuit inherent to the standard complementary metal-oxide-semiconductor manufacturing process, thus avoiding additional off-chip optics or post-processing. This technique allows the use of two pixels for horizontal or vertical angle detection, and can determine the light's angle in the range from -45° to +45°. The proposed sensor enables surface-profile reconstruction of microscale samples using a lensless imaging system.
Keywords
Angle sensitive pixels; Subwavelength compound grating; Surface profile;
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