Polarization Maintaining Dichroic Beam-splitter and Its Surface Shape Control by Back Side AR Coating |
Ma, Chong
(Shanghai Institute of Technical Physics, Chinese Academy of Sciences)
Chen, Gang (Shanghai Institute of Technical Physics, Chinese Academy of Sciences) Liu, Dingquan (Shanghai Institute of Technical Physics, Chinese Academy of Sciences) Zhang, Rongjun (Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University) He, Junbo (Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University) Zhu, Xudan (Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Department of Optical Science and Engineering, Fudan University) Li, Daqi (Shanghai Institute of Technical Physics, Chinese Academy of Sciences) |
1 | J. Yin, Y. Cao, Y.-H. Li, S.-K. Liao, L. Zhang, J.-G. Ren, W.-Q. Cai, W.-Y. Liu, B. Li, H. Dai, G.-B. Li, Q.-M. Lu, Y.-H. Gong, Y. Xu, S.-L. Li, F.-Z. Li, Y.-Y. Yin, Z.-Q. Jiang, M. Li, J.-J. Jia, G. Ren, D. He, Y.-L. Zhou, X.-X. Zhang, N. Wang, X. Chang, Z.-C. Zhu, N.-L. Liu, Y.-A. Chen, C.-Y. Lu, R. Shu, C.-Z. Peng, J.-Y. Wang, and J.-W. Pan, "Satellite-based entanglement distribution over 1200 kilometers," Science 356, 1140-1144 (2017). DOI |
2 | Y. T. Pu, Z. Qiao, G. Wang, F. Qiu, P. Ma, and S. Wang, "Stress reduction and structural properties of Ta2O5/SiO2 mixture films produced by ion-beam sputtering," Proc. SPIE 9683, 968323 (2016). |
3 | J. B. Oliver, J. Spaulding, and B. Charles, "Stress compensation by deposition of a nonuniform corrective coating," Appl. Opt. 59, A54-A57 (2020). |
4 | Y. W. Yao, B. D. Chalifoux, R. K. Heilmann, and M. L. Schattenburg, "Thermal oxide patterning method for compensating coating stress in silicon substrates," Opt. Express 27, 1010-1024 (2019). DOI |
5 | R. Kaewon, C. Pawong, R. Chitaree, and A. Bhatran, "Polarization phase-shifting technique for the determination of a transparent thin film's thickness using a modified sagnac interferometer," Curr. Opt. Photon. 2, 474-481 (2018). DOI |
6 | E. Chason, J. W. Shin, S. J. Hearne, and L. B. Freund, "Kinetic model for dependence of thin film stress on growth rate, temperature, and microstructure," J. Appl. Phys. 111, 083520 (2012). DOI |
7 | Y. F. Chen and J. B. Xiao, "Compact silicon-based polarization beam splitter using directional couplers assisted with subwavelength gratings," Opt. Eng. 59, 017101 (2020). |
8 | B. D. Chalifoux, Y. W. Yao, K. B. Woller, R. K. Heilmann, and M. L. Schattenburg, "Compensating film stress in thin silicon substrates using ion implantation," Opt. Express 27, 11182-11195 (2019). DOI |
9 | S. Melnikas, U. Gimzevskis, and S. Kicas, "Stress compensated back side chirped mirror with high negative dispersion," Opt. Laser Technol. 121, 1052820 (2020). |
10 | T. Amotchkina, M. K. Trubetskov, Y. Pervak, L. Veisz, and V. Pervak, "Stress compensation with antireflection coatings for ultrafast laser applications: from theory to practice," Opt. Express 22, 30387-30393 (2014). DOI |
11 | R. P. Abel, U. Krohn, P. Siddons, I. G. Hughes, and C. S. Adams, "Faraday dichroic beam splitter for Raman light using an isotopically pure alkali-metal-vapor cell," Opt. Lett. 34, 3071-3073 (2009). DOI |
12 | M. Ohring, Materials Science of Thin Films: Deposition and Structure, 2nd ed. (Academic Press, MA, USA. 2002). |
13 | G. G. Stoney, "The tension of metallic films deposited by electrolysis," Proc. R. Soc. Lond. A 82, 172-175 (1909). DOI |
14 | J. Yin, J.-G. Ren, H. Lu, Y. Cao, H.-L. Yong, Y.-P. Wu, C. Liu, S.-K. Liao, F. Zhou, Y. Jiang, X.-D. Cai, P. Xu, G.-S. Pan, J.-J. Jia, Y.-M. Huang, H. Yin, J.-Y. Wang, Y.-A. Chen, C.-Z. Peng, and J.-W. Pan, "Quantum teleportation and entanglement distribution over 100-kilometre free-space channels," Nature 488, 185-188 (2012). DOI |
15 | J. B. Oliver, P. Kupinski, A. L. Rigatti, A. W. Schmid, J. C. Lambropoulos, S. Papernov, A. Kozlov, C. Smith, and R. D. Hand, "Stress compensation in hafnia/silica optical coatings by inclusion of alumina layers," Opt. Express 20, 16596-16610 (2012). DOI |
16 | G. Vallone, D. Bacco, D. Dequal, S. Gaiarin, V. Luceri, G. Bianco, and P. Villoresi, "Experimental satellite quantum communications," Phys. Rev. Lett. 115, 040502 (2015). DOI |
17 | A. Orieux and E. Diamanti, "Recent advances on integrated quantum communications," J. Optics 18, 083002 (2016). DOI |
18 | V. Scarani, H. Bechmann-Pasquinucci, N. J. Cerf, M. Dusek, N. Lutkenhaus, and M. Peev, "The security of practical quantum key distribution," Rev. Mod. Phys. 81, 1301 (2009). DOI |
19 | S. Barz, E. Kashefi, A. Broadbent, J. F. Fitzsimons, A. Zeilinger, and P. Walther, "Demonstration of blind quantum computing," Science 335, 303-308 (2012). DOI |
20 | R.W. Falcone and J. Bokor, "Dichroic beam splitter for extreme-ultraviolet and visible radiation," Opt. Lett. 8, 21-23 (1983). DOI |
21 | R. J. Zaldivar, H. I. Kim, and G. L. Ferrelli, "Effect of gamma radiation on the stability of UV replicated composite mirrors," Opt. Engineering 57, 047102 (2018). |
22 | A. Ullah, H. Wilke, I. Memon, Y. Shen, D. T. Nguyen, C. Woidt, and H. Hillmer, "Stress relaxation in dual ion beam sputtered Nb2O5 and SiO2 thin films: application in a Fabry-Perot filter array with 3D nanoimprinted cavities," J. Micromech. Microeng. 25, 055019 (2015). DOI |
23 | C. A. Davis, "A simple model for the formation of compressive stress in thin films by ion bombardment," Thin Solid Films 226, 30-34 (1993). DOI |
24 | S. Kicas, U. Gimzevskis, and S. Melnikas, "Post deposition annealing of IBS mixture coatings for compensation of film induced stress," Opt. Mater. Express 6, 2236-2243 (2016). DOI |