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http://dx.doi.org/10.3807/COPP.2021.5.1.040

Reflective Fourier Ptychographic Microscopy Using Segmented Mirrors and a Mask  

Ahn, Hee Kyung (Optical Imaging and Metrology Team, Korea Research Institute of Standards and Science)
Chon, Byong Hyuk (Optical Imaging and Metrology Team, Korea Research Institute of Standards and Science)
Publication Information
Current Optics and Photonics / v.5, no.1, 2021 , pp. 40-44 More about this Journal
Abstract
In this paper, LED arrays with segmented mirrors and a mask are presented as a new dark-field illuminator for reflective Fourier ptychographic microscopy (FPM). The illuminator can overcome the limitations of the size and the position of samples that the dark-field illuminator using a parabolic mirror has had. The new concept was demonstrated by measuring a USAF 1951 target, and it resolved a pattern in group 10 element 6 (274 nm) in the USAF target. The new design of the dark-field illuminator can enhance competitiveness of the reflective FPM as a versatile measurement method in industry.
Keywords
Phase retrieval; Three-dimensional imaging; 3D shape measurement;
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