Browse > Article
http://dx.doi.org/10.3807/COPP.2020.4.4.293

Chip-scale Temperature-compensated Superstructured Waveguide Bragg Grating Based Multiparametric Sensor  

Vishwaraj, Naik Parrikar (Department of Electronics and Communication Engineering, National Institute of Technology Goa)
Nataraj, Chandrika Thondagere (Department of Electronics and Telecommunication Engineering, Siddaganga Institute of Technology)
Jagannath, Ravi Prasad Kogravalli (Department Applied Sciences, National Institute of Technology Goa)
Gurusiddappa, Prashanth (Department of Electronics and Communication Engineering, National Institute of Technology Goa)
Talabattula, Srinivas (Department of Electrical Communication Engineering, Indian Institute of Science)
Publication Information
Current Optics and Photonics / v.4, no.4, 2020 , pp. 293-301 More about this Journal
Abstract
In this paper we propose and theoretically analyze a monolithic multiparametric sensor consisting of a superstructure of surface-relief waveguide Bragg gratings (WBGs), a micro-machined diaphragm, and a cantilever beam. Diaphragms of two different configurations, namely circular and square, are designed and analyzed separately for pressure measurement. The square diaphragm is then selected for further study, since it shows relatively higher sensitivity compared to the circular one, as it incurs more induced stress when any pressure is applied. The cantilever beam with a proof mass is designed to enhance the sensitivity for acceleration measurement. A unique mathematical method using coupled-mode theory and the transfer-matrix method is developed to design and analyze the shift in the Bragg wavelength of the superstructure configuration of the gratings, due to simultaneously applied pressure and acceleration. The effect of temperature on the wavelength shift is compensated by introducing another Bragg grating in the superstructure configuration. The measured sensitivities for pressure and acceleration are found to be 0.21 pm/Pa and 6.49 nm/g respectively.
Keywords
Waveguide Bragg gratings; Pressure sensor; Accelerometer; Optical sensors; MOEMS;
Citations & Related Records
연도 인용수 순위
  • Reference
1 H. J. Sheng, W. F. Liu, T. C. Chen, S. S. Bor, and M. Y. Fu, "A lateral pressure sensor using a fiber Bragg grating," in Proc. Pacific Rim Conference on Lasers and Electro-Optics (CLEO) (Taipei, Taiwan, Dec. 2003), Vol. 2, pp. 674.
2 A. R. Sankar, J. G. Jency, and S. Das, "Design, fabrication and testing of a high-performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures," Microsyst. Technol. 18, 9-23 (2012).   DOI
3 D. Feng, X. Qiao, H. Yang, Q. Rong, R. Wang, Y. Du, M. Hu, and Z. Feng, "A fiber Bragg grating accelerometer based on a hybridization of cantilever beam," IEEE Sens. J. 15, 1532-1537 (2015).   DOI
4 J. Dong, Z. J. Long, H. Jiang, and L. Sun, "Monolithicintegrated piezoresistive MEMS accelerometer pressure sensor with glass-silicon-glass sandwich structure," Microsyst. Technol. 23, 1563-1574 (2017).   DOI
5 J. Xu, Y. Zhao, Z. Jiang, and J. Sun, "A monolithic silicon multi-sensor for measuring three-axis acceleration, pressure and temperature," J. Mech. Sci. Technol. 22, 731-739 (2008).   DOI
6 P. K. Pattnaik, B. Vijayaaditya, T. Srinivas, and A. Selvarajan, "Optical MEMS pressure and vibration sensors using integrated optical ring resonators," in Proc. SENSORS (Irvine, CA, USA, Nov. 2005), pp. 636-639.
7 G. N. D. Brabander, J. T. Boyd, and G. Beheim, "Integrated optical ring resonator with micromechanical diaphragm for pressure sensing," IEEE Photonics Technol. Lett. 6, 671-673 (1994).   DOI
8 C. Thondagere, A. Kaushalram, T. Srinivas, and G. Hegde, "Mathematical modeling of optical MEMS differential pressure sensor using waveguide Bragg gratings embedded in Mach Zehnder interferometer," J. Opt. 20, 085802 (2018).   DOI
9 E. Pinet, "Pressure measurement with fiber-optic sensors: commercial technologies and applications," Proc. SPIE 7753, 775304 (2011).
10 S. Kim, J. Kwon, S. Kim, and B. Lee, "Temperatureindependent strain sensor using a chirped grating partially embedded in a glass tube," IEEE Photonics Technol. Lett. 12, 678-680 (2000).   DOI
11 V. Neeharika and P. K. Pattnaik, "Optical MEMS pressure sensors incorporating dual waveguide Bragg gratings on diaphragms," IEEE Sens. J. 16, 681-687 (2016).   DOI
12 C. R. Pollock and M. Lipson, "Coupled mode theory," in Integrated Photonics (Springer US, 2003), pp. 241-269.
13 A. Yariv, "Coupled-mode theory for guided-wave optics," IEEE J. Quantum Electron. 9, 919-933 (1973).   DOI
14 A. Yariv and P. Yeh, "Wave propagation in periodic media," in Photonics: Optical Electronics in Modern Communications (Oxford Series in Electrical and Computer Engineering), A. S. Sedra, ed., 6th ed. (Oxford University Press, NY, USA, 2007), pp. 539-601.
15 M. H. Bao, "Basic mechanics of beam and diaphragm structures," in Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes (Handbook of Sensors and Actuators Series), S. Middelhoek, ed. (Elsevier, The Netherlands, 2000), Vol. 8, pp. 23-88.
16 C. Holmes, "Direct UV written planar devices for sensing and telecommunication applications," Ph. D. Dissertation, University of Southampton, Southampton (2009).
17 M. M. Werneck, R. C. S. B. Allil, B. A. Ribeiro, F. V. B. D. Nazare, "A guide to fiber Bragg grating sensors," in Current Trends in Short-and Long-period Fiber Gratings, C. C. Laborde, ed. (InTech, Rijeka, Croatia, 2013), pp. 2-24.
18 A. D. Kersey, M. A. Davis, H. J. Patrick, M. LeBlanc, K. P. Koo, C. G. Askins, M. A. Putnam, and E. J. Friebele, "Fiber grating sensors," J. Lightwave Technol. 15, 1442-1463 (1997).   DOI
19 Y. Zhang, D. Feng, Z. Liu, Z. Guo, X. Dong, K. S. Chiang, and B. C. B. Chu, "High-sensitivity pressure sensor using a shielded polymer-coated fiber Bragg grating," IEEE Photonics Technol. Lett. 13, 618-619 (2001).   DOI