Chip-scale Temperature-compensated Superstructured Waveguide Bragg Grating Based Multiparametric Sensor |
Vishwaraj, Naik Parrikar
(Department of Electronics and Communication Engineering, National Institute of Technology Goa)
Nataraj, Chandrika Thondagere (Department of Electronics and Telecommunication Engineering, Siddaganga Institute of Technology) Jagannath, Ravi Prasad Kogravalli (Department Applied Sciences, National Institute of Technology Goa) Gurusiddappa, Prashanth (Department of Electronics and Communication Engineering, National Institute of Technology Goa) Talabattula, Srinivas (Department of Electrical Communication Engineering, Indian Institute of Science) |
1 | H. J. Sheng, W. F. Liu, T. C. Chen, S. S. Bor, and M. Y. Fu, "A lateral pressure sensor using a fiber Bragg grating," in Proc. Pacific Rim Conference on Lasers and Electro-Optics (CLEO) (Taipei, Taiwan, Dec. 2003), Vol. 2, pp. 674. |
2 | A. R. Sankar, J. G. Jency, and S. Das, "Design, fabrication and testing of a high-performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures," Microsyst. Technol. 18, 9-23 (2012). DOI |
3 | D. Feng, X. Qiao, H. Yang, Q. Rong, R. Wang, Y. Du, M. Hu, and Z. Feng, "A fiber Bragg grating accelerometer based on a hybridization of cantilever beam," IEEE Sens. J. 15, 1532-1537 (2015). DOI |
4 | J. Dong, Z. J. Long, H. Jiang, and L. Sun, "Monolithicintegrated piezoresistive MEMS accelerometer pressure sensor with glass-silicon-glass sandwich structure," Microsyst. Technol. 23, 1563-1574 (2017). DOI |
5 | J. Xu, Y. Zhao, Z. Jiang, and J. Sun, "A monolithic silicon multi-sensor for measuring three-axis acceleration, pressure and temperature," J. Mech. Sci. Technol. 22, 731-739 (2008). DOI |
6 | P. K. Pattnaik, B. Vijayaaditya, T. Srinivas, and A. Selvarajan, "Optical MEMS pressure and vibration sensors using integrated optical ring resonators," in Proc. SENSORS (Irvine, CA, USA, Nov. 2005), pp. 636-639. |
7 | G. N. D. Brabander, J. T. Boyd, and G. Beheim, "Integrated optical ring resonator with micromechanical diaphragm for pressure sensing," IEEE Photonics Technol. Lett. 6, 671-673 (1994). DOI |
8 | C. Thondagere, A. Kaushalram, T. Srinivas, and G. Hegde, "Mathematical modeling of optical MEMS differential pressure sensor using waveguide Bragg gratings embedded in Mach Zehnder interferometer," J. Opt. 20, 085802 (2018). DOI |
9 | E. Pinet, "Pressure measurement with fiber-optic sensors: commercial technologies and applications," Proc. SPIE 7753, 775304 (2011). |
10 | S. Kim, J. Kwon, S. Kim, and B. Lee, "Temperatureindependent strain sensor using a chirped grating partially embedded in a glass tube," IEEE Photonics Technol. Lett. 12, 678-680 (2000). DOI |
11 | V. Neeharika and P. K. Pattnaik, "Optical MEMS pressure sensors incorporating dual waveguide Bragg gratings on diaphragms," IEEE Sens. J. 16, 681-687 (2016). DOI |
12 | C. R. Pollock and M. Lipson, "Coupled mode theory," in Integrated Photonics (Springer US, 2003), pp. 241-269. |
13 | A. Yariv, "Coupled-mode theory for guided-wave optics," IEEE J. Quantum Electron. 9, 919-933 (1973). DOI |
14 | A. Yariv and P. Yeh, "Wave propagation in periodic media," in Photonics: Optical Electronics in Modern Communications (Oxford Series in Electrical and Computer Engineering), A. S. Sedra, ed., 6th ed. (Oxford University Press, NY, USA, 2007), pp. 539-601. |
15 | M. H. Bao, "Basic mechanics of beam and diaphragm structures," in Micro Mechanical Transducers: Pressure Sensors, Accelerometers and Gyroscopes (Handbook of Sensors and Actuators Series), S. Middelhoek, ed. (Elsevier, The Netherlands, 2000), Vol. 8, pp. 23-88. |
16 | C. Holmes, "Direct UV written planar devices for sensing and telecommunication applications," Ph. D. Dissertation, University of Southampton, Southampton (2009). |
17 | M. M. Werneck, R. C. S. B. Allil, B. A. Ribeiro, F. V. B. D. Nazare, "A guide to fiber Bragg grating sensors," in Current Trends in Short-and Long-period Fiber Gratings, C. C. Laborde, ed. (InTech, Rijeka, Croatia, 2013), pp. 2-24. |
18 | A. D. Kersey, M. A. Davis, H. J. Patrick, M. LeBlanc, K. P. Koo, C. G. Askins, M. A. Putnam, and E. J. Friebele, "Fiber grating sensors," J. Lightwave Technol. 15, 1442-1463 (1997). DOI |
19 | Y. Zhang, D. Feng, Z. Liu, Z. Guo, X. Dong, K. S. Chiang, and B. C. B. Chu, "High-sensitivity pressure sensor using a shielded polymer-coated fiber Bragg grating," IEEE Photonics Technol. Lett. 13, 618-619 (2001). DOI |