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http://dx.doi.org/10.3807/COPP.2020.4.4.277

An Evaluation Model for Analyzing the Overlay Error of Computer-generated Holograms  

Gan, Zihao (College of Intelligence Science, National University of Defense Technology)
Peng, Xiaoqiang (College of Intelligence Science, National University of Defense Technology)
Hong, Huajie (College of Intelligence Science, National University of Defense Technology)
Publication Information
Current Optics and Photonics / v.4, no.4, 2020 , pp. 277-285 More about this Journal
Abstract
Computer-generated holograms (CGH) are the core devices to solve the problem of freeform surface measurement. In view of the overlay error introduced in the manufacturing process of CGH, this paper proposes an evaluation model for analyzing the overlay error of CGH. The detection method of extracting CGH profile information by an ultra-depth of field micro-measurement system is presented. Furthermore, based on the detection method and technical scheme, the effect of overlay error on the wavefront accuracy of CGH can be evaluated.
Keywords
Computer-generated holograms; Overlay error; Evaluation model; Wavefront accuracy;
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