High-speed Three-dimensional Surface Profile Measurement with the HiLo Optical Imaging Technique |
Kang, Sewon
(Graduate School of Mechanical Engineering, Seoul National University)
Ryu, Inkeon (Department of Mechanical Engineering, Dankook University) Kim, Daekeun (Department of Mechanical Engineering, Dankook University) Kauh, Sang Ken (Department of Mechanical Engineering, Seoul National University) |
1 | D. Bhattacharya, V. Raj Singh, C. Zhi, P. T. C So, P. Matsudaira, G. Barbastathis, O. E. Olarte, J. Licea-Rodriguez, J. A. Palero, E. J. Gualda, D. Artigas, J. Mayer, J. Swoger, J. Sharpe, I. Rocha-Mendoza, R. Rangel-Rojo, P. Loza-Alvarez, P. J. Keller, A. D. Schmidt, J. Wittbrodt, E. H. K Stelzer, A. Santella, K. Khairy, and Z. Bao, "Three dimensional HiLo-based structured illumination for a digital scanned laser sheet microscopy (DSLM) in thick tissue imaging," Opt. Express 20, 27337-27347 (2012). DOI |
2 | J. Mertz and J. Kim, "Scanning light-sheet microscopy in the whole mouse brain with HiLo background rejection," J. Biomed. Opt. 15, 016027 (2010). DOI |
3 | M. A. A. Neil, R. Juškaitis, and T. Wilson, "Method of obtaining optical sectioning by using structured light in a conventional microscope," Opt. Lett. 22, 1905 (1997). DOI |
4 | P. A. Stokseth, "Properties of a defocused optical system," J. Opt. Soc. Am. 59, 1314 (1969). DOI |
5 | B. Christoffer Lagerholm, S. Vanni, D. Lansing Taylor, and F. Lanni, "Cytomechanics applications of optical sectioning microscopy," Methods Enzymol. 361, 175-197 (2003). |
6 | F. Lanni, "Grating imager systems for fluorescence opticalsectioning microscopy," Cold Spring Harb. Protoc. 2014, 923-931 (2014). |
7 | C. A. Schneider, W. S. Rasband, and K. W. Eliceiri, "NIH Image to ImageJ: 25 years of image analysis," Nat. Methods 9, 671 (2012). DOI |
8 | D. Lim, "HiLo ImageJ Plugin (version 1.2)," http://biomicroscopy.bu.edu/resources/4. |
9 | S. K. Nayar and Y. Nakagawa, "Shape from Focus," IEEE Trans. Pattern Anal. Mach. Intell. 16, 824-831 (1994). DOI |
10 | Z. Xie, Y. Tang, Y. Zhou, and Q. Deng, "Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy," Opt. Express 26, 2944 (2018). DOI |
11 | D. B. Williams and C. B. Carter, Transmission Electron Microscopy (2009). |
12 | D. Dan, M. Lei, B. Yao, W. Wang, M. Winterhalder, A. Zumbusch, Y. Qi, L. Xia, S. Yan, Y. Yang, P. Gao, T. Ye, and W. Zhao, "DMD-based LED-illumination Superresolution and optical sectioning microscopy," Sci. Rep. 3, 1-7 (2013). |
13 | M. T. Le, L. C. Chen, and C. J. Lin, "Reconstruction of accurate 3-D surfaces with sharp edges using digital structured light projection and multi-dimensional image fusion," Opt. Lasers Eng. 96, 17-34 (2017). DOI |
14 | S. W. Lee, S. Y. Lee, and H. J. Pahk, "Precise edge detection method using sigmoid function in blurry and noisy image for TFT-LCD 2D critical dimension measurement," Curr. Opt. Photon. 2, 69-78 (2018). |
15 | S. Pertuz, D. Puig, and M. A. Garcia, "Analysis of focus measure operators for shape-from-focus," Pattern Recognit. 46, 1415-1432 (2013). DOI |
16 | F. Chen, G. M. Brown, and M. Song, "Overview of threedimensional shape measurement using optical methods," Opt. Eng. 39, 10-22 (2000). DOI |
17 | D. R. Lee, Y. D. Kim, D. G. Gweon, and H. Yoo, "High speed 3D surface profile without axial scanning: Dualdetection confocal reflectance microscopy," Meas. Sci. Technol. 25, (2014). |
18 | John Kuo, ed., Electron Microscopy: Methods and Protocols, Third Edition (Humana Press, Totowa, NJ, 2014). |
19 | K D Vernon-Parry, "Scanning electron microscopy: an introduction," III-Vs Rev. 13, 40-44 (2000). |
20 | Richard Leach, ed., Optical Measurement of Surface Topography, 1st ed. (Springer-Verlag Berlin Heidelberg, 2011). |
21 | N. MUnera, G. J. Lora, and J. Garcia-Sucerquia, "Evaluationof fringe projection and laser scanning for 3D reconstructionof dental pieces | Evaluación de proyección de franjas yescaneo láser para la reconstrucción 3D de piezas dentales,"DYNA 79, 65-73 (2012). |
22 | E. McLeod and A. Ozcan, "Unconventional methods of imaging: Computational microscopy and compact implementations," Rep. Prog. Phys. 79, (2016). |
23 | D. Lim, K. K. Chu, and J. Mertz, "Wide-field fluorescence sectioning with hybrid speckle and uniform-illumination microscopy," Opt. Lett. 33, 1819-1821 (2008). DOI |
24 | E. Muro, P. Vermeulen, A. Ioannou, P. Skourides, B. Dubertret, A. Fragola, and V. Loriette, "Single-shot optical sectioning using two-color probes in HiLo fluorescence microscopy," Biophys. J. 100, 2810-2819 (2011). DOI |
25 | D. Lim, T. N. Ford, K. K. Chu, and J. Mertz, "Optically sectioned in vivo imaging with speckle illumination HiLo microscopy," J. Biomed. Opt. 16, 016014 (2011). DOI |
26 | T. N. Ford, D. Lim, and J. Mertz, "Fast optically sectioned fluorescence HiLo endomicroscopy," J. Biomed. Opt. 17, 021105 (2012). DOI |
27 | S. Santos, K. K. Chu, D. Lim, N. Bozinovic, T. N. Ford, C. Hourtoule, A. C. Bartoo, S. K. Singh, and J. Mertz, "Optically sectioned fluorescence endomicroscopy with hybrid-illumination imaging through a flexible fiber bundle," J. Biomed. Opt. 14, 030502 (2009). DOI |
28 | E. Meyer, "Atomic force microscopy," Prog. Surf. Sci. 41, 3-49 (1992). DOI |