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http://dx.doi.org/10.3807/COPP.2018.2.6.568

High-speed Three-dimensional Surface Profile Measurement with the HiLo Optical Imaging Technique  

Kang, Sewon (Graduate School of Mechanical Engineering, Seoul National University)
Ryu, Inkeon (Department of Mechanical Engineering, Dankook University)
Kim, Daekeun (Department of Mechanical Engineering, Dankook University)
Kauh, Sang Ken (Department of Mechanical Engineering, Seoul National University)
Publication Information
Current Optics and Photonics / v.2, no.6, 2018 , pp. 568-575 More about this Journal
Abstract
Various techniques to measure the three-dimensional (3D) surface profile of a 3D micro- or nanostructure have been proposed. However, it is difficult to apply such techniques directly to industrial uses because most of them are relatively slow, unreliable, and expensive. The HiLo optical imaging technique, which was recently introduced in the field of fluorescence imaging, is a promising wide-field imaging technique capable of high-speed imaging with a simple optical configuration. It has not been used in measuring a 3D surface profile although confocal microscopy originally developed for fluorescence imaging has been adapted to the field of 3D optical measurement for a long time. In this paper, to the best of our knowledge, the HiLo optical imaging technique for measuring a 3D surface profile is proposed for the first time. Its optical configuration and algorithm for a precisely detecting surface position are designed, optimized, and implemented. Optical performance for several 3D microscale structures is evaluated, and it is confirmed that the capability of measuring a 3D surface profile with HiLo optical imaging technique is comparable to that with confocal microscopy.
Keywords
3D surface profile; HiLo microscopy; Structured illumination; 3D Shape measurement;
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