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http://dx.doi.org/10.3807/KJOP.2021.32.6.296

Effect of the Cylindrical Fly-eye Lens's Precision on Long-axis Uniformity and Steepness of a Line Beam  

Lee, Seungmin (Prooptics Co., Ltd.)
Song, Hyunsu (Prooptics Co., Ltd.)
Woo, Hee (Prooptics Co., Ltd.)
Kim, Daeyong (Prooptics Co., Ltd.)
Jung, Jinho (Prooptics Co., Ltd.)
Publication Information
Korean Journal of Optics and Photonics / v.32, no.6, 2021 , pp. 296-305 More about this Journal
Abstract
This paper reports a study on the long axis performance of the line beam optics used in laser lift-off equipment for the OLED manufacturing process. The centration errors of the cylindrical lens are classified and defined in seven categories, and the measurement methods are presented. The cylindrical fly-eye lens is analyzed theoretically and experimentally to find the influence of the surface shape error and decentering error on the long axis performance of the line beam optics system. A future research direction is also presented to improve the long axis performance.
Keywords
Fly-eye lens; Laser lift-off; Line beam; Long axis uniformity; Steepness;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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