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http://dx.doi.org/10.3807/KJOP.2021.32.6.276

Research on BTU and Short-axis Geometry of Line-beam Optics for LLO Applications  

Lee, Seungmin (Prooptics Co., Ltd.)
Lee, Gwangjin (Prooptics Co., Ltd.)
Kim, Daeyong (Prooptics Co., Ltd.)
Lee, Sanghyun (Prooptics Co., Ltd.)
Jung, Jinho (Prooptics Co., Ltd.)
Publication Information
Korean Journal of Optics and Photonics / v.32, no.6, 2021 , pp. 276-285 More about this Journal
Abstract
This paper reports the study of the line-beam optical system of the laser lift-off (LLO) equipment used in the OLED manufacturing process. To obtain both a long process depth and a narrow width of the line beam, even with the poor M2 value of the laser source, the research is focused on the optical system, including the beam transformation unit (BTU). We also propose optical configurations for the super-Gaussian distribution and the fiber-based BTU for the flat-top distribution.
Keywords
Beam transformation unit; Depth of focus; Laser lift-off; Line beam; Super Gaussian;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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