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http://dx.doi.org/10.3807/KJOP.2015.26.5.275

Ellipsometric Expressions for a Sample Coated with Uniaxially Anisotropic Layers  

Kim, Sang Youl (Department of Physics, Ajou University)
Publication Information
Korean Journal of Optics and Photonics / v.26, no.5, 2015 , pp. 275-282 More about this Journal
Abstract
The effective reflection coefficients for light obliquely incident upon a substrate coated with uniaxially anisotropic films and with isotropic films are derived. Multiple reflections inside anisotropic films, as well as those inside isotropic films, are properly treated. These expressions, together with the related ellipsometric expressions, can be used to find the nonuniform distribution of an uniaxially anisotropic film perpendicular to the film's surface, by approximating it as consisting of uniaxially anisotropic uniform layers and applying the conventional modeling technique for spectroscopic ellipsometry.
Keywords
Reflection ellipsometry; Uniaxial layers; Distribution of optic axis;
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Times Cited By KSCI : 5  (Citation Analysis)
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